Method and apparatus for generating test patterns used in testing semiconductor integrated ciruit

ABSTRACT

A test pattern sequence which is used to test a delay fault or an open fault which accompanies a delay occurring in an IC is easily and rapidly generated. A list of locations such as logic gates and signal lines within the circuit where a fault is likely to occur is prepared ( 101 ). One of the faults is selected, and an initialization test pattern v 1  which establishes an initial value for activating the fault at the location of a fault is determined by the implication operation ( 103 ), and a propagation test pattern v 2  which causes a stuck-at fault to be propagated to a following gate is determined by the implication operation ( 105 ). A sequence formed by v 1  and v 2  is registered with a test pattern list ( 107 ), and the described operations are repeated until there remains no unprocessed fault in the fault list.

BACKGROUND OF THE INVENTION

[0001] The invention relates a method and an apparatus for generating test patterns used in testing a semiconductor integrated circuit, and in particular, to a method and an apparatus for generating test patterns which are used to detect a gate delay fault, an open fault which gives rise to a gate delay fault, and a path delay fault with the aid of a transient power supply current signal.

[0002] Test patterns for testing an abnormal delay time of a logic gate in a semiconductor integrated circuit under test (hereafter referred to as “gate delay fault”) are provided in the prior art by preparing a test pattern which initializes an output from a logic gate under test of the circuit to a signal value (initial logic value) and another test pattern which tests the logic gate under test for a stuck-at fault, or a fault that the output from the logic gate under test is fixed to the initial logic value. FIG. 1a shows an example of the semiconductor circuit under test. The circuit includes input terminals x₂ and x₃ connected to inputs of NAND gate G₁. Input terminals x₃ and x₄ are connected to inputs of NAND gate G₂. Outputs from NAND gates G₁ and G₂ feed NOR gate G₃, the output of which feeds NOR gate G₄ together with an input applied to an input terminal x₁. Output from NAND gate G₃ also feeds NAND gate G₅ together with an input applied to an input terminal x₅. Outputs from NOR gate G₄ and NAND gate G₅ feed NOR gate G₆, the output of which is connected to an output terminal z₁.

[0003] For the illustrated semiconductor circuit under test, a test pattern which examines a “slow-to-rise” gate delay fault of the logic gate G₃ is generated in a manner as described below. First of all, a test pattern x₁=x, x₂=x, x₃=0, x₄=x and x₅=x which produces an initial value of “0” at the output of the faulty gate G₃ is determined as shown in FIG. 1a. Here, “x” indicates a “don't care” value or either “1” or “0”. This test pattern is denoted hereafter as v1=(xx0xx). Assuming a stuck-at fault at the faulty gate G₃ such that its output is fixed to the initial value of “0”, a test pattern v2=(0x111) is then determined which allows the stuck-at fault to be detected at the output signal line of the semiconductor circuit (see FIG. 1(b)). As a consequence, a test pattern sequence which detects a slow-to-rise fault at gate G₃ is defined as T=<v1, v2>=<“xx0xx”, “0x111”>. A technique for generating test patterns for the gate delay fault is disclosed, for example, in E. S. Park and M. R. Mercer, “An Efficient Delay Test Generation System for Combinatorial Logic Circuits”, Transactions on Computer-Aided Design, 11(7), pp926-938, 1992 or U. Mahlstedt, “DELTEST: Deterministic Test Generation for Gate Delay Faults”, Proceedings of IEEE International Test Conference, pp. 972-980, 1993.

[0004] A signal propagation path in a semiconductor integrated circuit is referred as a path. A time interval required for a signal to propagate from an input signal line to an output signal line of a path is referred to as a path delay time. When a path delay time exceeds a given value, a circuit fails to operate normally, and this is referred as a path delay fault. Two test patterns are generally necessary to test a delay fault, and are commonly referred to as a test vector pair or a test pattern sequence. According to the conventional practice, a test pattern sequence which tests a path delay fault in an integrated circuit is generated by utilizing a five logic value system shown in FIG. 2 and assigning the logic values to various signal lines in the circuit under test according to an implication table shown in FIG. 3 or a sensitizing table shown in FIG. 4. In FIG. 2, S0 remains to be “0” for either pattern v1 or v2; S1 remains to be “1” for either pattern v1 or v2; U0 is equal to “x” for pattern v1 and to “0” for pattern v2; U1 is equal to “x” for pattern v1 and to “1” for pattern v2; and XX remains to be “x” for either pattern v1 or v2.

[0005] Output states of AND gate shown in FIG. 3a 1 when its input terminals x₁, x₂ assume various combinations of S0, U0, S1, U1 and XX are illustrated in the implication table of FIG. 3a 2. To give an example, when x₁ is equal to S0 and x₂ is equal to U0, it follows that v1=<0,x> and v2=<0,0>, and thus the output is <0,0>=S0. Output states of NOR gate shown in FIG. 3b 1 when its input terminals x₁, x₂ assume various combinations of S0, U0, S1, U1, and XX are illustrated in the implication table of FIG. 3b 2. Similarly, output states of an inverter shown in FIG. 3c 1 when a single input terminal x₁ assumes one of S0, U0, S1, U1 and XX are illustrated in the implication table of FIG. 3c 2.

[0006]FIG. 4a shows a value of the other input signal to change the output status or to activate the circuit when one input to AND gate has changed from “0” to “1”. In the present instance, it may be S1 or from “x” to “1”. For the instance of FIG. 4b where one input changes from “1” to “0”, the other input may be U1 or remain to be “1” in order to change the output state (or to activate the circuit). FIG. 4c shows the five value logic of the other input signal required to activate the respective gates when one input to AND gate, NAND gate, OR gate or NOR gate rises from “0” to “1” or falls from “1” to “0”.

[0007] In an integrated circuit shown in FIG. 5a, inputs from input terminals x₁ and x₂ feed AND gate G₁; inputs from input terminals x₃ and x₄ feed OR gate G₂; the input from the input terminal x₁ feeds an inverter G₃; an output from the inverter G₃ and an input from an input terminal x₅ feed AND gate G₅; outputs from the gates G₁ and G₂ feed NOR gate G₄; and outputs from the gates G₄ and G₅ feed OR gate G₆. In order to generate a test pattern for a path delay fault which might occur on a path P shown in thick lines in this circuit or a path extending from the input terminal x₃ through G₂, G₄ and G₆ to an output line, transition signals as shown in FIG. 5a are initially provided on signal lines located on the path P under test, the sensitizing table shown in FIG. 4c is utilized to apply signal values which activate the gates G₂, G₆ to side inputs, namely, input signal lines to the logic gates G₂, G₆, but which are not disposed on the path P, as shown in FIG. 5b, and finally, signal values to be applied to individual input signal lines are determined on the basis of signal values which have been allotted in the manner mentioned above, using the implication table shown in FIG. 3, as illustrated in FIG. 6. In the example shown in FIGS. 5 and 6, the test pattern sequence which tests the path delay fault on the path P is determined as T=<v1, v2>=< “S0 XX U1 S0 U0”>=<“0x00x”, “0x100”>. A technique for generating test patterns for the path delay fault is disclosed, for example, in C. J. Lin and S. M. Reddy, “On Delay Fault Testing in Logic Circuits”, Transactions on Computer-Aided Design, CAD-6(5), pp 694-703, 1987 (referred to as literature 1) or K. T. Cheng, A. Kristic and H. C. Chen, “Generation of High Quality Tests for Robustly Untestable Path Delay Faults”, Transactions on Computers, 45(12), pp 1379-1392, 1996.

[0008] The method of generating test patterns described above with reference to FIG. 1 is subject to a restriction that the influence of a fault must be propagated to an output terminal (pin) of a circuit under test because the technique is based on the observation of a voltage signal on the output terminal (pin) of the circuit under test, and thus the generation of test patterns involves a difficulty. In particular, to test for a small gate delay fault in which an increment in the delay time is minimal or less than a clock period of the circuit under test, an output signal from a faulty gate must be propagated to the output terminal (pin) through a signal transmission path having a greatest delay time, and accordingly, it is very difficult to generate two test patterns (test vector pair or test pattern sequence) to activate the fault.

[0009] In a conventional method of generating test patterns, the need to propagate the influence of a gate delay fault and an open fault to the output signal line increases the probability that logic values on signal lines which are produced by the implication operation to generate path test patterns may become contradictory among logic values on signal lines, resulting in difficulties that the number of times that the set-up of signals must be retried (back-track) to generate test patterns increases and that it takes an increased length of time to generate test patterns.

[0010] Accordingly, there is a need for a method of generating test patterns which is capable of generating test pattern sequence easily and rapidly in order to test for a gate delay fault, or an open fault which gives rise to a gate delay fault in an integrated circuit.

[0011] The method of generating test patterns described above with reference to FIGS. 5 and 6 is subject to a restriction that non-controlling input values must be set up to side inputs or every input signal line, which is not disposed on a path under test, to each logic gate disposed on the path under test in order to activate the path under test, and another restriction that there must not be any hazard (whisker-like voltage pulse) on the path under test and side inputs in order to generate a test pattern sequence which is qualified to a robust path delay fault testing, that is, test results independent from the timing of an output voltage sampling. As a consequence of this, it is with a great difficulty to generate a test pattern sequence. In addition, the number of path delay faults for which the test pattern sequence cannot be generated increases, presenting a problem that the trouble shooting rate of the path delay faults is degraded. The non-controlling input value refers to a logic value which cannot determine an output of a logic gate uniquely. For example, a non-controlling input value for AND gate or NAND gate is a logic value of “1”, and a non-controlling input value for OR gate or NOR gate is a logic value of “0”.

[0012] Accordingly, there is a need for a method of generating test patterns which is capable of easily and efficiently generating test pattern sequence which can be used with the path delay faults of an integrated circuit.

[0013] It is an object of the invention to provide a test pattern generating method and apparatus which is capable of generating easily and efficiently test pattern sequence which can be used with a delay fault or an open fault within a semiconductor integrated circuit, by utilizing a highly observable transient power supply current (I_(DDT)) testing technique which is capable of testing a transient phenomenon in a circuit.

[0014] It is another object of the invention to provide a test pattern generating method and apparatus which is capable of easily generating test pattern sequence which can be used with a path delay fault in a semiconductor integrated circuit and thus capable of providing an efficient test pattern sequence, by utilizing a highly observable transient power supply current (I_(DDT)) testing technique which is capable of testing a transient phenomenon in a circuit.

SUMMARY OF THE INVENTION

[0015] In a method of generating a test pattern sequence for testing a semiconductor integrated circuit according to a first aspect of the present invention, a fault list which can occur in a semiconductor integrated circuit under test is prepared, one of the faults for which the test patterns are to be generated is selected from the list, an initializing test pattern which applies an initial value which causes the fault to be activated to a location corresponding to the selected fault is determined, assuming that a fault occurs at the fault location where a stuck-at at the initial value occurs, a propagation test pattern which propagates the stuck-at fault to the output of a following logic gate which follows the fault location is determined, a test pattern sequence comprising the initializing test pattern and the propagation test pattern determined as mentioned above is registered with a test pattern list, and the steps including and subsequent to the step of selecting the fault are repeated until an unprocessed fault ceases to exist in the fault list.

[0016] The test pattern sequence mentioned above may be generated by generating a test pattern sequence which applies signal values according to the five value logic system which activate the selected fault to the location corresponding to the selected fault and which propagates the signal values to the output of a logic gate which follows the fault location. Alternatively, a different technique may be used.

[0017] As a further alternative, there may be provided a client system and a plurality of server systems wherein the client system prepares the fault list, which may be divided into a plurality of fault sub-lists to be transmitted to the plurality of server systems where each of the server systems selects one of faults for which test patterns are to be generated from the fault sub-list transmitted from the client system and determines a test pattern sequence which applies a signal which activates the fault to the location corresponding to the selected fault and which propagates the signal to a logic gate which follows the location of the fault and returns the test pattern sequence to the client system, the server system notifying the client system that it has completed the processing operation whenever an unprocessed fault ceases to exist in the fault sub-list, the client system registering a test pattern sequence which is returned from the plurality of servers with a test pattern list and terminating its processing operation upon receipt of notifications from all of the server systems that their generations of test patterns have been completed.

[0018] The test pattern sequence can be generated rapidly using such a distributed processing operation.

[0019] Using the registered test pattern sequence, a transient power supply current fault simulation may be conducted to prepare a fault list which can be detected with the test pattern sequence (hereafter referred to as a detected fault list), and the faults contained in the detected fault list may be deleted from the fault list.

[0020] In this manner, the processing of faults contained in the fault list can be rapidly completed.

[0021] When using the client system in combination with the plurality of server systems, rather than dividing the fault list into sub-lists and transmitting them immediately to the server systems, the faults may be transmitted one by one sequentially to a particular server system which has completed its processing operation, and a test pattern sequence which is returned from the server system or which is to be registered may be used to conduct a transient power supply current fault simulation to prepare a fault list which can be detected with this test pattern sequence (or a detected fault list), and the faults contained in the detected fault list may be deleted from the fault list. In this manner, the overall processing speed can be increased. Alternatively, the server systems may select a fault or faults from the fault list stored by the client system to process it, and may examine if there is any unprocessed fault in the fault list.

[0022] It is desirable that the step of generating the test pattern sequence generates the test pattern sequence in unit of a gate delay fault.

[0023] It is also desirable that the step of generating the test pattern sequence generates the test pattern sequence in unit of an open fault.

[0024] In a method of generating test patterns according to a second aspect of the present invention, a list of path delay faults for a semiconductor integrated circuit under test (a fault list) is prepared, a test pattern sequence comprising two or more test patterns which are to be applied to the semiconductor integrate circuit is generated, the test pattern sequence is used to perform a transition simulation of the semiconductor integrated circuit under test, a train of transition signal values which occur on signal lines within the circuit are calculated, using the transition signal values on the signal lines calculated by the transition simulation, a fault list which can be detected by the transient power supply current test using the test pattern sequence (a detected fault list) is prepared, faults contained in the detected fault list are deleted from the fault list, the test pattern sequence is registered with a test pattern sequence list, and the steps including and subsequent to generating the test pattern sequence is repeated until the path delay faults contained in the fault list is reduced below a given number.

[0025] Again, a client system and a plurality of server systems may be provided wherein the client system, for example, prepares a list of path delay faults (a fault list), test pattern sequence are generated and are transmitted one each to one or more server systems which are not performing a processing operation, each server system performs a transition simulation using the test pattern sequence which is transmitted from the client system, calculates a train of transition signal values produced on signal lines within the circuit, prepares a fault list which can be detected by the transient power supply current test in accordance with this test pattern sequence using the transition signal values (a detected fault list) and deletes faults contained in the detected fault list from the fault list, and the client system notifies the completion of a processing operation to each server system whenever the number of path delay faults which remain in the fault list is reduced below a given value. Alternatively, the client system may prepare a list of a sufficient number of test pattern sequence previously, which are then fractionated into a plurality of test pattern sequence sub-lists, which are transmitted to each server system, which in turn selects a test pattern sequence from the list of test sub-pattern sequence for purpose of its processing operation.

[0026] In the description to follow, the principle of the present invention will be described in terms of a CMOS integrated circuit which represents a most common semiconductor integrated circuit. According to the invention, a transient power supply current testing technique is utilized, and accordingly, the transient power supply current of the CMOS integrated circuit and the fault detection which is based on the transient power supply current will be described below.

[0027] Transient Current in a CMOS Logic Gate

[0028]FIG. 7 shows a transient response of a CMOS inverter shown in FIGS. 7c and d. The transient response has been determined with a circuit simulator. FIG. 7a shows a response of an output voltage V_(OUT) with respect to an input voltage V_(IN) in a transient condition, while FIG. 7b shows a response of a current I_(DD) which flows from a power supply into the CMOS inverter. The current I_(DD) is referred to as a transient current. When the input IN of the inverter transitions from “1” to “0” (see FIG. 7c), n-MOS and p-MOS are only momentarily turned on as long as the input voltage is higher than the threshold voltage of n-MOS and lower than the threshold voltage of p-MOS, whereby a short-circuit current Is flows from a power supply terminal T_(VD) to a ground GND. An output OUT from an output signal line of the inverter then transitions from “0” to “1”, and accordingly, at the same time as the short-circuit current I_(S), a current I_(C) which is associated with a capacitance charging of a parasitic capacitance C_(load) connected to the output signal line of the inverter flows from the power supply terminal T_(VD) to the parasitic capacitance C_(load). Accordingly, when a falling transition (denoted by suffix “f”) occurs on the input IN of the inverter, the transient current I_(Gf) which flows into the inverter is given by the sum of the short-circuit current I_(Sf) and the capacitance charging current I_(C).

[0029] On the other hand, when the input IN transitions from “0” to “1” or when the output transitions from “1” to “0” (denoted by suffix “r”) (see FIG. 7d), a capacitance discharge occurs from the parasitic capacitance C_(load) connected to the output signal line, thus producing a capacitance discharge current I_(D), but the current I_(Gr) which flows from the power supply terminal T_(VD) to the inverter comprises only the short-circuit current I_(Sr). Accordingly, a peak of the current T_(VD) is slightly smaller than the peak of the transient current I_(Gf) which occurs during the falling transition as shown in FIG. 7b.

I_(Gr)=I_(Sr)   (2)

[0030] The CMOS inverter has a transfer characteristic which is such that a triangular pulse current I_(S) is produced in response to a change in the input voltage V_(IN), as shown in FIG. 8a. Accordingly, when a rising transition occurs on the input of the CMOS inverter, the short-circuit current waveform I_(Sr) which flow through the CMOS inverter can be approximated by a triangular pulse, as indicated by “I_(S)” in FIG. 8b, assuming a ramp transition for the input voltage V_(IN). The short-circuit current waveform I_(Sr) with respect to the rising transition of the input signal as indicated in FIG. 8b can be given by the following approximations: $\begin{matrix} {I_{S\quad r} = \left\{ \begin{matrix} {0,} & {t \leq {\frac{V_{T\quad H\quad N}}{V_{D\quad D}}t_{r}}} \\ {{{\frac{V_{D\quad D} \cdot I_{S\quad \max}}{\left( {V_{S\quad P} - V_{T\quad H\quad N}} \right) \cdot t_{r}}t} - \frac{V_{T\quad H\quad N} \cdot I_{S\quad \max}}{\left( {V_{S\quad P} - V_{T\quad H\quad N}} \right)}},} & {{\frac{V_{T\quad H\quad N}}{V_{D\quad D}}t_{r}} < t \leq {\frac{V_{S\quad P}}{V_{D\quad D}}t_{r}}} \\ {{{\frac{V_{D\quad D} \cdot I_{S\quad \max}}{\left( {V_{S\quad P} - V_{D\quad D} + V_{T\quad H\quad P}} \right) \cdot t_{r}}t} - \frac{\left( {V_{D\quad D} - V_{T\quad H\quad P}} \right) \cdot I_{S\quad \max}}{\left( {V_{S\quad P} - V_{D\quad D} + V_{T\quad H\quad P}} \right)}},} & {{\frac{V_{S\quad P}}{V_{D\quad D}}t_{r}} < t \leq {\frac{V_{D\quad D} - V_{T\quad H\quad P}}{V_{D\quad D}}t_{r}}} \\ {0,} & {t \geq {\frac{V_{D\quad D} - V_{T\quad H\quad P}}{V_{D\quad D}}t_{r}}} \end{matrix} \right.} & (3) \end{matrix}$

[0031] where I_(Smax) represents a maximum value of the transient current (short-circuit current) which flows into the CMOS inverter, V_(DD) represents a power supply voltage, V_(THN) a threshold voltage of n-MOS transistor, V_(THP) a threshold voltage of a p-MOS transistor and t_(r) a time interval for the rising transition of the input signal. It is to be noted that V_(THP) is indicated in its absolute magnitude. To simplify the approximations, it is assumed that the transition of the input voltage V_(IN) begins at time 0, and the input voltage reaches to V_(DD) at time t_(r) which represents the completion of the transition.

[0032] Similarly, the short-circuit current waveform I_(Sf) of the CMOS inverter in response to the falling transition of the input signal can be given by the following approximations: $\begin{matrix} {I_{S\quad f} = \left\{ \begin{matrix} {0,} & {t \leq {\frac{V_{T\quad H\quad P}}{V_{D\quad D}}t_{f}}} \\ {{{\frac{V_{D\quad D} \cdot I_{S\quad \max}}{\left( {V_{D\quad D} - V_{T\quad H\quad P} - V_{S\quad P}} \right) \cdot t_{f}}t} - \frac{V_{T\quad H\quad P} \cdot I_{S\quad \max}}{\left( {V_{D\quad D} - V_{T\quad H\quad P} - V_{S\quad P}} \right)}},} & {{\frac{V_{T\quad H\quad P}}{V_{D\quad D}}t_{f}} < t \leq {\frac{V_{D\quad D} - V_{S\quad P}}{V_{D\quad D}}t_{f}}} \\ {{{\frac{V_{D\quad D} \cdot I_{S\quad \max}}{\left( {V_{T\quad H\quad N} - V_{S\quad P}} \right) \cdot t_{f}}t} - \frac{\left( {V_{D\quad D} - V_{T\quad H\quad N}} \right) \cdot I_{S\quad \max}}{\left( {V_{T\quad H\quad N} - V_{S\quad P}} \right)}},} & {{\frac{V_{D\quad D} - V_{S\quad P}}{V_{D\quad D}}t_{f}} < t \leq {\frac{V_{D\quad D} - V_{T\quad H\quad N}}{V_{D\quad D}}t_{f}}} \\ {0,} & {t \geq {\frac{V_{D\quad D} - V_{T\quad H\quad N}}{V_{D\quad D}}t_{f}}} \end{matrix} \right.} & (4) \end{matrix}$

[0033] where t_(f) represents a time interval for the falling transition of the input signal. For the sake of convenience, times for the start of the rising transition of the power supply current, the maximum value I_(Smax) and the end of the falling transition are indicated in parentheses in FIG. 8b.

[0034] Denoting a voltage change on the output signal line by v_(out) (t), the charging current I_(C) to the parasitic capacitance C_(load) connected to the output signal line of the CMOS inverter is given by the following equation: $\begin{matrix} {I_{C} = {C_{load}\frac{{v_{out}(t)}}{t}}} & (5) \end{matrix}$

[0035] Such equations can be similarly determined for logic gates other than the inverter.

[0036] Assuming that the transient current I_(G) which flows into a logic gate is substantially short-circuit current, it can be approximated by a triangular pulse as indicated by I_(S) in FIG. 8b. In actuality, the transient current waveform I_(G) of the CMOS inverter represents a triangular pulse as shown in FIG. 7b. Accordingly, the transient current I_(G) of the logic gate increases monotonously until the maximum value I_(Smax) is reached whereupon it decreases monotonously, as shown in FIG. 8b. The transient current I_(G) reaches its maximum value I_(Smax) when the input voltage V_(IN) reaches the switching voltage V_(SP) for the logic gate. Specifically, as shown in FIG. 8b, the time when the current I_(G) reaches its peak coincides with the time of input transition of the logic gate. Because the logic gate has a delay time, the time for the output transition of the logic gate will be slightly lagging with respect to the time for the input transition. Thus, the time when the current I_(G) reaches its peak slightly precedes the time for the output transition of the logic gate. In this instance, the falling edge of the transient current waveform I_(G) may be considered as coincident with the time for the output transition. In addition, the transient current waveform I_(G) of the logic gate has a pulse width which is proportional to the transition time of the input voltage (for example the time interval t_(r) for the rising transition).

[0037] In the above description, it has been assumed that the transient current I_(G) which flows into the logic gate is substantially a short-circuit current I_(S). However, with a miniaturization of a CMOS manufacturing process, the wiring delay will be more dominant over the gate delay. This means that assuming a constant transition time interval for the input voltage, the proportion of the charging current I_(C) to the output signal line will be greater than the proportion of the short-circuit current I_(S) in the transient current I_(G) which flows into the CMOS logic gate. Accordingly, the time when the transient current waveform of the logic gate reaches its peak depends on the ratio of the 9charging current I_(C) to the short-circuit current I_(S). When I_(C) is less than I_(S), the peak of the transient current waveform I_(G) coincides with the peak of I_(S). Because the peak of I_(S) coincides with the transition time interval of the input voltage, it follows that the peak of I_(G) precedes the time for the output transition of the logic gate. Conversely, if I_(C) is greater than I_(S), the peak of the transient current waveform coincides with the peak of I_(C). Because the charging current I_(C) relates to the voltage transition on the output signal line, the peak of I_(G) is substantially coincident with the time for the output transition of the logic gate.

[0038] Integral of Transient Power Supply Current

[0039] Using the equations (3) and (4), time integrals Q_(Sr) and Q_(Sf) of the short-circuit currents I_(Sr) and I_(Sf) are given as follows: $\begin{matrix} {Q_{S\quad r} = {{\int_{- \infty}^{\infty}{I_{S\quad r}{t}}} = {\frac{I_{S\quad \max}\left( {V_{D\quad D} - V_{T\quad H\quad N} - V_{T\quad H\quad P}} \right)}{2V_{D\quad D}}t_{r}}}} & (6) \\ {Q_{S\quad f} = {{\int_{- \infty}^{\infty}{I_{S\quad f}{t}}} = {\frac{I_{S\quad \max}\left( {V_{D\quad D} - V_{T\quad H\quad N} - V_{T\quad H\quad P}} \right)}{2V_{D\quad D}}t_{f}}}} & (7) \end{matrix}$

[0040] Accordingly, the integral Q_(S) of the short-circuit current through the logic gate as it is switched is given as follows: $\begin{matrix} {{Q_{S} \equiv {\int_{- \infty}^{\infty}{I_{S}{t}}}} = {{\frac{I_{S\quad \max}\left( {V_{D\quad D} - V_{T\quad H\quad N} - V_{T\quad H\quad P}} \right)}{2V_{D\quad D}}t_{T}} \propto t_{T}}} & (8) \end{matrix}$

[0041] where t_(T) represents a transition time for the input signal. Thus, the integral Q_(S) of the short-circuit current I_(S) (I_(Sr) or I_(Sf)) which flows into the logic gate is proportional to the time t_(T) for the input transition of the logic gate. It will also be seen that Q_(S) does not depend on whether the transition of the input signal is rising or falling.

[0042] From the equation (5), it is seen that the integral Q_(C) of the charging current I_(C) to an output load capacitance C_(load) of a CMOS inverter is given by the equation indicated below. $\begin{matrix} \begin{matrix} {Q_{C} = {{\int_{- \infty}^{\infty}{I_{C}{t}}} = {\int_{- \infty}^{\infty}{C_{load}\frac{{v_{out}(t)}}{t}{t}}}}} \\ {= {{C_{load}\left\lbrack {v_{out}(t)} \right\rbrack}_{- \infty}^{\infty} = {{C_{load}\left( {V_{D\quad D} - 0} \right)} = {C_{load}V_{D\quad D}}}}} \end{matrix} & (9) \end{matrix}$

[0043] and it is seen that it does not depend on the time t_(T) for the input transition of the CMOS inverter.

[0044] Consequently, the integrals Q_(Gf) and Q_(Gr) of the transient currents I_(Gf) and I_(Gr) passing through the logic gate are determined from the equations (1), (2), (8) and (9) as follows: $\begin{matrix} {Q_{G\quad F} = {{\int_{- \infty}^{\infty}{\left( {I_{S\quad f} + I_{C}} \right){t}}} = {{{\frac{I_{S\quad \max}\left( {V_{D\quad D} - V_{T\quad H\quad N} - V_{T\quad H\quad P}} \right)}{2V_{D\quad D}}t_{T}} + {C_{load}V_{D\quad D}}} \propto t_{T}}}} & (10) \\ {Q_{G_{r}} = {{\int_{- \infty}^{\infty}{I_{S\quad r}{t}}} = {{\frac{I_{S\quad \max}\left( {V_{D\quad D} - V_{T\quad H\quad N} - V_{T\quad H\quad P}} \right)}{2V_{D\quad D}}t_{T}} \propto t_{T}}}} & (11) \end{matrix}$

[0045] Thus, an integral of the transient current through the logic gate is proportional to the time for the input transition of the logic gate.

[0046] Transient Power Supply Current I_(DDI) in CMOS Integrated Circuit

[0047] A power supply current in a CMOS integrated circuit represents a power supply current which flows into the CMOS integrated circuit, and is represented by a sum of currents which flow through individual logic gates within the integrated circuit.

[0048] A CMOS integrated circuit shown in FIG. 9a comprises a combination of four (G₁, G₂, G₃, G₄) of the inverter shown in FIG. 7c and which are connected in tandem. Transient currents I_(G1), I_(G2), I_(G3), I_(G4) which flow through the inverters G₁, G₂, G₃, G₄ are normally fed from a single power supply terminal T_(VD). Accordingly, the transient power supply current response of the integrated circuit is represented by a sum of transient currents flowing through the individual logic gates as shown in FIG. 9c and as given below. $\begin{matrix} {I_{D\quad D\quad T} = {\sum\limits_{n = 1}^{N}I_{G\quad n}}} & (12) \end{matrix}$

[0049] where N represents the number of logic gates which are switched by input test pattern sequence. In the example shown in FIG. 9a, N=4. FIG. 9b shows a relationship between an input voltage and an output voltage of each logic gate.

[0050] Accordingly, when there is a fault in the integrated circuit which causes a change in the transient current of the logic gate and when there is a test pattern sequence which is capable of activating the fault, the fault can be detected by an observation of I_(DDT) of the integrated circuit.

[0051] An integrated value Q_(DDT) of the transient power supply current I_(DDT) can be represented as a sum of integrated values Q_(Gn) (1≦n≦N) of currents which pass through individual logic gates. $\begin{matrix} {Q_{D\quad D\quad T} = {{\int_{- \infty}^{\infty}{I_{D\quad D\quad T}{t}}} = {{\int_{- \infty}^{\infty}{\left( {\sum\limits_{n = 1}^{N}I_{G\quad n}} \right){t}}} = {{\sum\limits_{n = 1}^{N}{\int_{- \infty}^{\infty}{I_{G\quad n}{t}}}} = {\sum\limits_{n = 1}^{N}Q_{G\quad n}}}}}} & (13) \end{matrix}$

[0052] In the example of FIG. 9a, the integrated value Q_(DDT) of the transient power supply current I_(DDT) is represented as a sum of integrated values (Q_(G1), Q_(G2), Q_(G3), Q_(G4)) of the currents (I_(G1), I_(G2), I_(G3), I_(G4)) passing through the individual inverters. Accordingly, if there is a fault within the integrated circuit which causes a transient current through the logic gate or its time integral to change and if there is a test pattern which is capable of activating the fault, the fault can be detected from an observation of the integrated value Q_(DDT) of the transient power supply current I_(DDT) of the integrated circuit.

[0053] Detection of Gate Delay Fault

[0054] A gate delay fault is a fault which causes a signal propagation delay from an input to an output of a logic gate to increase. A fault which causes a rising transition of an output from the logic gate to retard is referred to as a slow-to-rise fault while a fault which causes a falling transition to retard is referred to as a slow-to-fall fault. When a gate delay fault occurs through a logic gate disposed within a CMOS integrated circuit, the output transition time of the logic gate is retarded. Accordingly, a logic gate which receives at its input an output from the faulty logic gate will have a retarded timing for the peak of the transient current. Accordingly, if a test pattern sequence could activate a faulty logic gate and switch another logic gate which is driven by the faulty gate, the gate delay fault can be detected from an observation of a lag in the current peak of I_(DDT) of the CMOS integrated circuit.

[0055] Detection of Open Fault

[0056] Next, an open fault which causes a delay fault will be defined. An open fault refers to an unintended electrical discontinuity, specifically indicating that a signal line is divided into two or more distinct signal lines. An open fault includes a breaking as may be caused by a poor contact due to an absence of metal or the presence of an oxide film, a breaking of a metal wiring due to poor patterning or etching, and a breaking in a diffusion layer or a polysilicon due to a mask failure. An open fault can be categorized into two types, including an open fault in which a wiring L is divided in two spaced portions L1 and L2, as shown in FIG. 10a and where an input V_(IN) to one end of the wiring L cannot appear at an output V_(OUT) at the other end of the wiring L to cause a “logic fault”, and another open fault in which the divided wiring portions L1 and L2 are spaced very closely as shown in FIG. 10c and where an input signal V_(IN) applied to one end of the wiring L flows as a tunnel current and transition signal appears at the other end of the wiring L with a delay to cause a “delay fault” as shown in FIG. 10d. An open fault which causes a logic fault involves a large scale of disconnection , so that there is no current flow if a voltage is applied across the signal lines (divided wiring portions L1 and L2) located on the opposite sides of the fault, and accordingly, there takes place no charging or discharge of the parasitic capacitance C_(load) in response to a signal transition, thus causing a logic fault in which the logic is fixed to a given value. By contrast, in an open fault which causes a delay fault, a very weak current flows when a voltage is applied across the signal lines (L1 and L2) located on the opposite sides of the fault, but the magnitude of the current is less than a normal current flow, retarding the charging or discharge of the parasitic capacitance C_(load) in response to the signal transition, thus increasing a delay time of the circuit. An open fault which causes a delay fault includes a resistive open fault in which a resistance between signal lines L1 and L2 becomes larger than a normal value as a result of a poor contact or the resistance of the signal line L becomes larger than a normal value as a result of a failure occurring in the signal line L, and a minuscule open fault (<100 nm) in which a very weak leak current flows across two broken signal line portions L1 and L2 by the tunnel effect. A tunnel current through a minuscule open fault is described, for example, in C. L. Henderson, J. M. Soden and C. F. Hawkins, “The Behavior and Testing Implications of CMOS IC Logic Gate Open Circuits” Proceedings of IEEE International Test Conference, pp.302-310, 1991. An open fault which causes a delay fault is dealt with herein and will be simply referred to as an open fault.

[0057] With the open fault, there is a small current flow through the fault, and thus it can be modeled by resistive element R_(open) having an increased resistance. FIG. 11a shows an example of a CMOS integrated circuit having an open fault. The CMOS integrated circuit comprises a pair of inverters G₁, G₂, and an open fault exists in a signal line M which connects between the inverters G₁, and G₂. The location of disconnection can be regarded as being equivalent to a connection through the resistor R_(open). When the inverter G₁ switches to produce a signal transition on the signal line M, the presence of the open fault causes a time interval required for an input parasitic capacitor C_(in) of the inverter G₂ to be charged or discharged increases (in proportion to the product of the resistance of the open fault and the parasitic capacitance), and accordingly, a signal transition on a signal line M′ which is located on the inverter G₂ side of the equivalent resistive element R_(open) is retarded as shown in FIG. 11c relative to an output from the inverter G₁ (FIG. 11b). Accordingly, as shown in FIG. 12, the transient current waveform (shown in dotted lines) of the inverter G₂ having the open fault on its input side has a greater width of the current pulse and a greater time integral of the transient current as compared with the transient current waveform (shown in solid line) of the normal inverter. Accordingly, by observing I_(DDT) or Q_(DDT) of the CMOS integrated circuit, the presence of an open fault in the input stage of the inverter G₂ can be detected. An open fault which exists on the output stage of the inverter G₁ is equivalent to an open fault present on the input stage of the inverter G₂, and thus can be similarly detected. For an open fault on any signal line in an integrated circuit generally, if an open fault can be activated by a test pattern sequence to cause a switching of a logic gate which is driven by the activated open fault, such open fault can be detected from an observation of I_(DDT) or Q_(DDT) of the integrated circuit.

[0058] Path Delay Fault

[0059] A route within an integrated circuit through which a signal is propagated is referred to as a path. When a delay time from a start point of the path (input signal line) to an end point (output signal line), which is referred to herein as path delay time, becomes greater (or less) than a given value, the integrated circuit exhibits an abnormal behavior, which is referred to as a path delay fault. A path delay fault will now be defined.

[0060] Consider that for a CMOS logic circuit that a path P={g₀,g₁,g₂, . . . ,g_(m)} is activated using a test pattern sequence T=<v₁,v₂> meaning that it contains two test patterns v₁ and v₂ and that a voltage signal v₂ follows a voltage signal v₁. g₀ represents an input signal line of the path P while g₁,g₂, . . . ,g_(m) represent output signal lines of logic gates G₁,G₂, . . . ,G_(m) on the path P. At the same time, g₀,g₁, . . . ,g_(m−1) represent input signal lines to the logic gates G₁,G₂, . . . ,G_(m) on the path P. Denoting the time for a signal transition on each signal line g₀,g₁, . . . ,g_(m) (the time when the voltage signal passes V_(DD)/2) by τ₀,τ₁, . . . , τ_(m), the gate delay time t_(gdi) (1≦i≦m) of the respective logic gates G₁,G₂, . . . ,G_(m) on the path P is given as follows:

t _(gdi)=τ_(i)−τ_(i−1)   (14)

[0061] Accordingly, the path delay time t_(pd) of the path P is given as a sum of the gate delay times t_(gdi), as follows: $\begin{matrix} {t_{p\quad d} = {{\sum\limits_{i = 1}^{m}t_{g\quad d\quad i}} = {\tau_{m} - \tau_{0}}}} & (15) \end{matrix}$

[0062] However, the actual gate delay time t_(gdi) varies under the influence of a fault as follows:

t _(gdi) =t _(gdi,typ)+δ_(i), 1≦i≦m   (16)

[0063] where t_(gdi,typ) represents a typical value of the gate delay time of the logic gate G₁, and δ_(i) represents a variation component in the gate delay time. For example, a breaking fault causes the gate delay time of only a faulty logic gate to increase without increasing the delay time of other logic gates. A parametric fault causes the delay time of every logic gate to increase. With the variation in the gate delay time, the path delay time t_(pd) similarly varies as indicated by an equation given below. $\begin{matrix} {t_{pd} = {{t_{{pd},{typ}} + \Delta} = {\sum\limits_{i = 1}^{m}\left( {t_{{gdi},{typ}} + \delta_{i}} \right)}}} & (17) \end{matrix}$

[0064] where t_(pd,typ) represents a typical value of a path delay time for the path P and Δ represents a variation component in the path delay time.

[0065]FIG. 13 is a schematic illustration of the fundamental principle of a delay fault testing technique. In order for a semiconductor integrated circuit (DUT) under test shown in FIG. 13a to operate normally, a signal transition which occurs in an input latch must pass through a path P in the semiconductor integrated circuit under test to be transmitted to an output latch in a given time interval. Accordingly, it will be seen from the relationship between an input V_(IN) and an output V_(OUT) and their relationship with respect to a system clock as shown in FIG. 13b, that the path delay time t_(pd) of the path P must satisfy the following requirement:

t_(pd)+T_(SU)<T_(CLK)−T_(SKW)   (18)

[0066] where T_(SU) represents a set-up time for the signal, T_(CLK) the period of the system clock and T_(SKW) a clock skew of the system clock. The clock skew T_(SKW) is a jitter of the system clock and represents an amount by which the edge of the system clock changes in the positive or negative direction. The equation (18) can be modified as follows:

t_(pd)<T_(CLK)−T_(SKW)−T_(SU)≡T′  (19)

[0067] Thus, the path delay time t_(pd) of the path P must be less than a time interval T′ which results when margins such as the set-at time T_(SU) and the clock skew T_(SKW) are subtracted from the clock period T_(CLK). If t_(pd) is greater than T′, the signal transmission along the path P cannot catch up with the system clock, and the circuit cannot operate properly. This condition is defined as a delay fault. In other words, the path P is defined as having a delay fault when t_(pd) is greater than a given time interval T′. T′ represents an upper limit of a permissible delay time.

[0068] Detection of Path Delay (Utilizing a Pulse Width of Transient Power Supply Current)

[0069] Since the peak or the falling edge of the transient current waveform of the logic gate corresponds to the time for the output transition of the logic gate, it follows that the last peak (or the last falling edge) of the transient power supply current waveform of the CMOS integrated circuit coincides with the time of the output transition of the logic gate which is the last to be switched in the CMOS integrated circuit. Accordingly, by detecting the last peak (or the last falling edge) of the transient power supply current waveform of the CMOS integrated circuit, and comparing the time of detection against the time for the input transition, a path delay time for the integrated circuit can be determined. The time for the last falling edge of the transient power supply current can be determined as a maximum value of the time when the transient power supply current assumes a given current value, for example, from the time for the input transition on the path of the integrated circuit. This current value represents a value of the power supply current when the output voltage from the last logic gate on the path under test reaches a value equal to one-half the supply voltage V_(DD), and can be determined by the circuit simulation of the circuit under test or from statistical data obtained with an actual device.

[0070] A path delay fault on the path under test can be detected by comparing the determined path delay time against a given time (such as a period T_(CLK) of a system clock, for example).

[0071] A technique for detecting a delay fault utilizing the pulse width of a transient power supply current mentioned above will now be described. According to this technique, the pulse width of the power supply current waveform of a circuit under test is measured and compared against a given time interval. The fundamental principle of the technique is illustrated in FIG. 14.

[0072] Assume that in a CMOS logic circuit, a plurality of paths P₁,P₂, . . . ,P_(n) are activated using test pattern sequence T=<v₁,v₂> including two test patterns v₁,v₂. Denoting the time when a j-th logic gate, as counted from the input of a path P_(i), is switched by τ_(ij), it will be noted that the number of logic gates depends on each of the paths P₁,P₂, . . . ,P_(n), and the time τ_(max) for the output transition of a logic gate G_(final) which is the last to be switched among the paths P₁,P₂, . . . ,P_(n) is given by the following equation: $\begin{matrix} {{\tau_{\max} = {\max\limits_{i,j}\left\{ \tau_{ij} \right\}}},{1 \leq i \leq n},{1 \leq j}} & (20) \end{matrix}$

[0073] Thus, a maximum value of path delay time t_(pd max) among the paths P₁,P₂, . . . ,P_(n) is determined as a time interval between τ_(max) and time τ₀ for the input transition, as indicated below.

t _(pd max)=τ_(max)−τ₀   (21)

[0074] On the other hand, the pulse width t_(PW) of the transient power supply current waveform of the CMOS logic circuit is defined as a time interval between the time τ₀ for the signal transition of the circuit input and the τ_(IDD) of the last peak (falling edge) of the transient power supply current waveform. Thus

t_(PW) ≡τ _(IDD)−τ₀   (22)

[0075] As mentioned previously, the time τ_(IDD) for the last peak of the transient power supply current waveform either coincides with the time τ_(max) for the output transition of the logic gate G_(final) which is the last to be switched or precedes τ_(max). Thus, the pulse width t_(PW) of the transient power supply current waveform corresponds to the delay time t_(pd max) of the path P which is activated by a test pattern T.

t _(PW)=τ_(IDD)−τ₀≦τ_(max)−τ₀=t_(pd max)   (23)

[0076] If t_(PW) is greater than the upper limit T′ of the permissible delay time, it follows that

T′<t_(PW)≦t_(pd max)   (24)

[0077] Thus, the signal transmission cannot catch up with the system clock on the path having the greatest delay time t_(pd max). Thus, there exists a delay fault in the circuit. In this manner, t_(PW) greater than T′ indicates the presence of a delay fault on some one of the activated paths, while t_(PW) less than T′ indicates the absence of a delay fault on any activated path.

t_(PW)≦T′ no delay fault

t_(PW)>T′ delay fault present   (25)

[0078] In this manner, a delay fault in the circuit can be tested by comparing the pulse width t_(PW) of the transient power supply current waveform against a given time T′.

[0079] Delay Fault Detecting Technique (Utilizing the Instantaneous Value of the Transient Power Supply Current)

[0080] Because the transient power supply current of a logic gate decreases monotonously after its peak as shown in FIG. 7b, it will be seen that the power supply current of the CMOS integrated circuit shown in FIG. 9c decreases monotonously subsequent to the time for the output transition of a logic gate which is the last to be switched in the integrated circuit. In other words, in a fault-free CMOS integrated circuit, denoting the time for the output transition of the last logic gate to be switched by τ_(max) and the instantaneous value of the transient power supply current at time τ_(max) by I′, the transient power supply current of the CMOS integrated circuit cannot become greater than I′ subsequent to τ_(max).

[0081] Using this principle, a path delay fault in a circuit under test can be detected by measuring the instantaneous value of a transient power supply current of a CMOS integrated circuit at a given time. The current value I′ which is used as a criterion for the judgment of a fault detection is a value of the power supply current at the time when an output from the last logic gate on a path under test assumes one-half the supply voltage, and can be determined by a circuit simulation of the circuit under test or from statistical data using an actual device.

[0082] A technique for detecting a delay fault utilizing the instantaneous value of the transient power supply current will be described. According to this technique, the instantaneous value of the transient power supply current of the circuit under test at a given time is measured, and is compared against the value of the transient power supply current of a golden circuit which is free from a delay fault. The fundamental principle of the technique is illustrated in FIG. 15.

[0083] Assume that in a CMOS logic circuit, a plurality of paths P₁,P₂, . . . ,P_(n) are activated by test pattern sequence T=<v₁,v₂>. Denoting the time when a j-th logic gate as counted from the input of a path P_(i) by τ_(ij), the time τ_(max) for the output transition of a logic gate G_(final) which is the last to be switched among the paths P₁,P₂, . . . ,P_(n) is given by the following equation: $\begin{matrix} {{\tau_{\max} = {\max\limits_{i,j}\left\{ \tau_{ij} \right\}}},{1 \leq i \leq n},{1 \leq j}} & (26) \end{matrix}$

[0084] Accordingly, a maximum value t_(pd.max) of the path delay time among the paths P₁,P₂, . . . ,P_(n) can be determined as a time interval between τ_(max) and a time τ₀ for the input transition, as indicated below.

t _(pd.max)=τ_(max)−τ₀   (27)

[0085] As mentioned previously, because the time for the output transition of a logic gate coincides with the time for the peak or the falling edge of the transient power supply current of the logic gate, it follows that τ_(max) corresponds to a time τ_(IDD) for the last peak or the falling edge of the transient power supply current waveform I_(DDT) of the circuit. The power supply current I_(G) of the logic gate can be approximated by a triangular wave and G_(final) represents the last gate to be switched, and hence, there is no logic circuit which has a peak of the power supply current subsequent to τ_(max). Accordingly, a power supply current waveform function i_(DDT) (t) is a monotonously decreasing function at time t which is t≧τ_(max). Thus, denoting the time function for the power supply current waveform by i_(DDT)(t) and the instantaneous value of the power supply current at a time τ_(max) by I′, the latter is given as follows:

I′≡i_(DDT) (τ_(max))   (28)

[0086] It follows that at time t which is t≧τ_(max),

i_(DDT)(t)≦i_(DDT)(τ_(max))=I′, t≧τ_(max)   (29)

[0087] In order for the circuit to operate properly, t_(pd max) must be less than the upper limit T′ of the delay time (which is equal to T_(CLK)−T_(SKEW)−T_(SU) as indicated in the equation (19). Thus

t _(pd max)=τ_(max)−τ₀<T′  (30)

[0088] Accordingly, in the absence of a fault in the circuit, it follows from the equation (29) that at time t which is t=T′+τ₀>τ_(max)

i_(DDT)(T′+τ₀)≦I′  (31)

[0089] If the instantaneous value of I_(DDT) at T′+τ₀ is greater than I′ or

i_(DDT)(T′+τ₀)>I′=i_(DDT)(τ_(max))   (32)

[0090] it follows from the equation (29) that because T′+τ₀ cannot be greater than τ_(max)

τ_(max)>T′+τ₀   (33)

t_(pd max)=τ_(max)−τ₀>T′  (34)

[0091] This means that on a path having the greatest delay time t_(pd max), the signal transmission cannot catch up with the system clock. Thus the presence of a delay fault in the circuit is indicated. In this manner, the fact that a value of the transient power supply current I_(DDT) (T′+τ₀) at time T′+τ₀ is greater than I′ indicates the presence of a delay fault in one of the activated paths. Conversely, the fact that i_(DDT)(T′+τ₀) is less than I′ indicates the absence of a delay fault on any activated path.

i_(DDT)(T′+τ₀)≦I′ no delay fault

i_(DDT)(T′+τ₀)>I′ delay fault present   (35)

[0092] As discussed above, a delay fault in the circuit can be detected by comparing the instantaneous value of I_(DDT) at a given time against I_(DDT) level of a fault-free circuit.

[0093] Detection of Path Delay Fault (Utilizing a Time Integral of Transient Power Supply Current)

[0094] In addition, by using the integrated value Q_(DDT) of the transient power supply current I_(DDT), a path delay fault which is caused by an open fault can be detected. A technique for detecting a path delay fault by utilizing an integrated value of the transient power supply current will now be described. According to this technique, an integrated value of a transient power supply current through a circuit under test is measured, and is compared against a given value to evaluate a path delay fault.

[0095] The integrated value Q_(DDT) of the transient power supply current I_(DDT) is represented as a sum of integrated values Q_(Gn) (1≦n≦N) of currents passing through individual logic gates. $\begin{matrix} \begin{matrix} {Q_{DDT} = \quad {{\int_{- \infty}^{\infty}{I_{DDT}\quad {t}}} = {\int_{- \infty}^{\infty}{\left( {\sum\limits_{n = 1}^{N}I_{Gn}} \right)\quad {t}}}}} \\ {= \quad {{\sum\limits_{n = 1}^{N}{\int_{- \infty}^{\infty}{I_{Gn}{t}}}} = {\sum\limits_{n = 1}^{N}Q_{Gn}}}} \end{matrix} & (13) \end{matrix}$

[0096] Since the integral Q_(Gn) (1≦n≦N) of the current passing through each logic gate is proportional to the time t_(Tn) (1≦n≦N) for the input transition of each logic gate, as indicated by the equation (10) or (11), Q_(DDT) is given by a linear polynomial of t_(Tn) (1≦n≦N). In the example shown in FIG. 9a, Q_(DDT) is given by a linear polynomial 36, indicated below, of the times (t_(T1),t_(T2),t_(T3),t_(T4)) for the input transitions of the respective inverters (G₁,G₂,G₃,G₄). $\begin{matrix} {Q_{DDT} = {{\sum\limits_{n = 1}^{N}Q_{Gn}} = {{{\sum\limits_{n = 1}^{N}Q_{Sn}} + {\sum\limits_{n = 1}^{N}Q_{Cn}}} = {{\sum\limits_{n = 1}^{N}{a_{n}t_{Tn}}} + b}}}} & (36) \end{matrix}$

[0097] In the equation (36), a_(n) represents a factor of proportionality between the integral Q_(Sn) of the short-circuit current through the logic gate G_(n) and the time t_(Tn) for the input transition of the logic gate G_(n), and b a constant term which is represented by a sum of charging currents Q_(Cn) which flow into the respective logic gates.

[0098] An open fault can be modeled by a large resistance R_(open) since a very weak current flows through the fault. FIG. 16a shows an example of CMOS inverter having an open fault at its input. When a signal transition as shown in FIG. 16b occurs on an input signal line A, a signal transition occurring on an signal line A′ which is located subsequent to the location of the fault is retarded due to the open fault as indicated in FIG. 16c. At this time, denoting the resistance of the open fault by R_(open) and the parasitic capacitance at the input of the inverter by C_(in), the time interval t_(T) for the signal transition on the signal line A′ is given as indicated below

t _(T) ≈t _(T,typ)+2.2R _(open) C _(in)   (37)

[0099] where t_(T,typ) represents a typical value of the transition time for the input signal when there is no fault. The transition time t_(T) is determined here as a time interval for the voltage to rise from 0.1 V_(DD) to 0.9 V_(DD) (or to fall from 0.9 V_(DD) to 0.1 V_(DD)). 2.2R_(open)C_(in) represents a time interval in order for a voltage across C_(in) rises from 0.1 V_(DD) to 0.9 V_(DD), and is determined from log_(e)(0.9 V_(DD)/0.1 V_(DD))×R_(open)C_(in). Thus, an increment in the transition time for the input signal of the inverter is proportional to the resistance R_(open) of the open fault. Accordingly, when there is an open fault on the input of a k-th inverter on the path under test, the integral Q_(DDT) of the power supply current of the CMOS integrated circuit is determined from the equations (36) and (37) as indicated by an equation (38). Thus, Q_(DDT) linearly changes in accordance with the resistance R_(open) of the open fault and the increment is proportional to the resistance R_(open) of the open fault. $\begin{matrix} \begin{matrix} {Q_{DDT} = \quad {{\sum\limits_{n = 1}^{N}{a_{n}t_{Tn}}} + b}} \\ {= \quad {\left( {{\sum\limits_{n = 1}^{N}{a_{n}t_{{Tn},{typ}}}} + b} \right) + {2.2a_{k}C_{in}R_{open}}}} \\ {= \quad {{Q_{{DDT},{typ}} + {2.2a_{k}C_{in}R_{open}}} \propto R_{open}}} \end{matrix} & (38) \end{matrix}$

[0100] where Q_(DDT.typ) represents a typical value of the integral of the power supply current when there is no fault. 2.2a_(k)C_(in)R_(open) appearing as a second term on the right hand side of the equation (38) is an addition which is based on the input open fault of the k-th inverter. The equation (38) shows a coincidence with a result of simulation performed on a change in Q_(DDT) with respect to R_(open) as shown in FIG. 17. FIG. 17 is a plot of a change in Q_(DDT) with respect to the resistance R_(open) of the open fault when there is an open fault in the input signal line IN2 of the inverter G₂ in the circuit shown in FIG. 9.

[0101] A gate delay time t_(gd) of a logic gate is proportional to the time t_(T) for the transition of an input signal as indicated by an equation (39) below. ( see equations 4.52 and 4.53, “Principles of CMOS VLSI Design-A Systems Perspective”, Second Edition, Addison-Weely Publishing Company, issued 1999, pp. 216-217) $\begin{matrix} {t_{gd} = {t_{{gd},{step}} + {\frac{1}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)t_{T}}}} & (39) \end{matrix}$

[0102] where t_(gd.step) represents a delay time of a fault free inverter with respect to a step input at transition time 0, and V_(TH) a threshold voltage for p-MOS or n-MOS, it being understood that V_(TH)=V_(THN) for a rising transition of an input , and V_(TH)=V_(THP) for a falling transition of an input. Accordingly, since a gate delay time t_(gd) of a logic gate having an open fault which can be modeled by a resistance R_(open) on an input signal line is given by the equation (37), it can be determined by substitution of the equation (37) into the equation (39), as indicated below. $\begin{matrix} \begin{matrix} {t_{gd} = \quad {t_{{gd},{step}} + {\frac{t_{T}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)}}} \\ {= \quad {t_{{gd},{step}} + {\frac{t_{T,{typ}} + {2.2R_{open}C_{in}}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)}}} \\ {= \quad {t_{{gd},{step}} + {\frac{t_{T,{typ}}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)} + {\frac{2.2C_{in}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)R_{open}}}} \\ {= \quad {{t_{{gd},{typ}} + {\frac{2.2C_{in}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)R_{open}}} \propto R_{open}}} \end{matrix} & (40) \end{matrix}$

[0103] where t_(gd typ) is a typical value of the gate delay time of a fault-free logic gate. Specifically, the gate delay time t_(gd) of a logic gate having an open fault varies depending on the resistance R_(open) of the fault, and the increment δ of the gate delay time is proportional to the resistance R_(open) of the fault. Consequently, when there is a braking fault on the input of any logic gate on the path under test, the path delay time t_(pd) of the path under test is also proportional to R_(open). This is indicated by an equation (41) given below which is obtained by the substitution of the equation (40) into the equation (17). $\begin{matrix} \begin{matrix} {t_{pd} = \quad {\sum\limits_{i = 1}^{m}t_{gdi}}} \\ {= \quad {{\sum\limits_{i = 1}^{m}t_{{gdi},{typ}}} + {\frac{2.2C_{ink}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)R_{open}}}} \\ {= \quad {{t_{{pd},{typ}} + {\frac{2.2C_{ink}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)R_{open}}} \propto R_{open}}} \end{matrix} & (41) \end{matrix}$

[0104] This agrees with the result of simulation conducted on a change of t_(pd) with respect to R_(open) as indicated in FIG. 18, which is a plot of a change of t_(pd) with respect to the resistance R_(open) of an open fault when there is an open fault in the input signal line IN2 of an inverter G₂ in the circuit shown in FIG. 9a.

[0105] When an open fault exist on the input of a logic gate G_(k) on the path P, the integral Q_(Sk) of the short-circuit current of the gate G_(k) is determined from the equations (8) and (37) as given below. $\begin{matrix} {Q_{Sk} = \quad {\frac{I_{Smax}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}}t_{Tk}}} \\ {= \quad {\frac{I_{Smax}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}}\left( {t_{{Tk},{typ}} + {2.2R_{open}C_{ink}}} \right)}} \\ {= \quad {{\frac{I_{Smax}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}} \cdot t_{{Tk},{typ}}} +}} \\ {\quad {{\frac{I_{Smax}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}} \cdot 2.2}R_{open}C_{ink}}} \\ {= \quad {Q_{{Sk},{typ}} + {\frac{2.2{I_{Smax}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}C_{ink}}{2V_{DD}} \cdot R_{open}}}} \end{matrix}$

[0106] Accordingly, the integral Q_(DDT) of the transient power supply current of the integrated circuit is determined according to the equation (36) as given below. $\begin{matrix} {Q_{Sk} = \quad {\frac{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}}t_{Tk}}} \\ {= \quad {\frac{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}} \cdot \left( {t_{{Tk},{typ}} + {2.2R_{open}C_{ink}}} \right)}} \\ {= \quad {{\frac{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}} \cdot t_{{Tk},{typ}}} +}} \\ {\quad {{\frac{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}{2V_{DD}} \cdot 2.2}R_{open}C_{ink}}} \\ {= \quad {Q_{{Sk},{typ}} + {\frac{2.2{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}C_{ink}}{2V_{DD}} \cdot R_{open}}}} \end{matrix}$

[0107] Thus, the integral Q_(DDT) of the transient power supply current of the integrated circuit is also proportional to the resistance R_(open) of the open fault.

[0108] Thus, it will be seen from the equations (41) and (42) that the delay time t_(pd) of the path P having an open fault changes linearly with respect to the integral Q_(DDT) of the transient power supply current of the CMOS integrated circuit, and this agrees with the result of a simulation conducted on the change of t_(pd) with respect to Q_(DDT) as indicated in FIG. 19, which is a plot of a change t_(pd) with respect to the integral Q_(DDT) of the transient power supply current when an open fault is present on the input signal line IN2 of an inverter G₂ in the circuit shown in FIG. 9a.

[0109] The substitution of R_(open) which is determined from the equation (42) into the equation (41) yields an equation (43). $\begin{matrix} \begin{matrix} {Q_{DDT} = \quad {\sum\limits_{n = 1}^{N}Q_{Gn}}} \\ {= \quad {{\sum\limits_{n = 1}^{N}Q_{Sn}} + {\sum\limits_{n = 1}^{N}Q_{Cn}}}} \\ {= \quad {{\sum\limits_{n = k}^{N}Q_{{Sn},{typ}}} + Q_{{Sk},{typ}} +}} \\ {\quad {{\frac{2.2{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}C_{ink}}{2V_{DD}} \cdot R_{open}} + {\sum\limits_{n = k}^{N}Q_{Cn}}}} \\ {= \quad {{\sum\limits_{n = 1}^{N}Q_{{Sn},{typ}}} +}} \\ {\quad {{\sum\limits_{n = 1}^{N}Q_{Cn}} + {\frac{2.2{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}C_{ink}}{2V_{DD}} \cdot R_{open}}}} \\ {= \quad {Q_{{DDT},{typ}} + {\frac{2.2{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}C_{ink}}{2V_{DD}} \cdot R_{open}}}} \end{matrix} & (42) \end{matrix}$

[0110] Denoting the integral of the transient power supply current when the path delay time t_(pd) is equal to the upper limit T′ of the permissible delay time by Q_(max), an equation (44), given below, is obtained by solving the equation (43) for Q_(max) by putting t_(pd)=T′ and Q_(DDT)=Q_(max). $\begin{matrix} \begin{matrix} {t_{pd} = \quad {t_{{pd},{typ}} + {\frac{2.2C_{ink}}{6}\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right)R_{open}}}} \\ {= \quad {t_{{pd},{typ}} + {\frac{2.2C_{ink}}{6}{\left( {1 - {2\frac{V_{TH}}{V_{DD}}}} \right) \cdot}}}} \\ {\quad \frac{{\left( {Q_{DDT} - Q_{{DDT},{typ}}} \right) \cdot 2}V_{DD}}{2.2{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}C_{INK}}} \\ {= \quad {t_{{pd},{typ}} + {\frac{V_{DD} - {2V_{TH}}}{3{I_{S\quad \max}\left( {V_{DD} - V_{THN} - V_{THP}} \right)}}\left( {Q_{DDT} - Q_{{DDT},{typ}}} \right)}}} \end{matrix} & (43) \end{matrix}$

[0111] The Q_(max) represents the upper limit of the integral Q_(DDT) of the transient power supply current of the CMOS integrated circuit which is free from a delay fault. Thus it can be determined that there is no path delay fault in the CMOS integrated circuit when Q_(DDT) is less than Q_(max) while there exists a path delay fault due to a break fault in the CMOS integrated circuit when Q_(DDT) is greater than Q_(max).

Q_(DDT)≦Q_(max) no delay fault

Q_(DDT)>Q_(max) delay fault present   (45)

[0112] As discussed above, by comparing the integral Q_(DDT) of the transient power supply current against the given value Q_(max), a delay fault in the circuit can be tested. The given value Q_(max) can be determined by a circuit simulation or from the equation (45) using statistical data.

[0113] Features of a Delay Fault Test by Way of the Transient Power Supply Current

[0114] The transient power supply current is a transient current which flows through a power supply pin of an integrated circuit, and a higher observability is assured for this transient current than for a voltage signal. Accordingly, a delay fault testing method which employs the transient power supply current is capable of assuring a high observability of a delay fault than with a delay fault testing technique which employs a voltage signal. By way of example, a delay fault testing technique which employs a voltage signal can not detect a delay fault unless the voltage signal is transmitted to an output signal line of an integrated circuit. By contrast, with a delay fault testing technique which employs a transient power supply current signal, a transient power supply current signal having a pulse width which corresponds to a delay time on a path on which the voltage signal is transmitted is observable if the voltage signal is not transmitted to an output signal line of the integrated circuit, and thus is capable of detecting a delay fault. Concomitantly, there is no need to transmit a voltage signal to an output signal line of an integrated circuit with the delay fault testing technique which employs the transient power supply current signal and accordingly, limitations imposed upon generating test patterns are reduced with this technique in comparison to the generation of test patterns for a conventional delay fault testing technique which employs a voltage signal where it is necessary to transmit the voltage signal to the output signal line of the integrated circuit. This allows the generation of test patterns to be facilitated. In extreme cases, if test pattern sequence are selected at random, the delay fault testing technique which employs the transient power supply current signal is capable of detecting a delay fault on a path which is activated by selected test pattern sequence.

[0115] Test Pattern Generating Technique (for Gate Delay Fault)

[0116] A test pattern generating method according to a first aspect of the present invention with respect to a single delay fault will be described. FIG. 20 shows an example of a CMOS integrated circuit under test. The integrated circuit under test remains the same as the circuit shown in FIG. 1, and includes five input terminals x₁, x₂, x₃, x₄, x₅, a single output terminal z₁, five internal signal nodes n₁, n₂, n₃, n₄, n₅, and six logic gates G₁, G₂, G₃, G₄, G₅, G₆. Nodes n₁ and n₂ represent junctions between the gates G₁ and G₂ with the gate G₃, n₃ represents a junction between the gate G₃ and the gates G₄ and G₅, and n₄ and n₅ represent junctions of the gates G₄ and G₅ with the gate G₆. While not shown, the power supply terminals for the gates G₁ to G₆ are connected to a common power supply. Generation of test patterns for a slow-to-rise gate delay fault in which a rising transition of the logic gate G₃ is retarded will be considered.

[0117] Initially, a test pattern v1=“xx0xx” which applies an initial value of “0” for the slow-to-rise fault to the output of the faulty gate G₃ will be determined by the implication operation, as shown in FIG. 20a. The implication operation is a procedure which is based on logic values on signal lines within the integrated circuit to determine logic values which are uniquely selected for the input and output signal lines of logic gates which are connected to the signal lines in a sequential manner, and takes place for both the input side (rearward operation) and the output side (forward operation) of the circuit. It is to be understood that signals “0”, “1” and “x” represent a low level signal, a high level signal and a don't care signal which may be either a low level or high level signal. For example, when a signal value “0” is to be set up at the output of NAND gate G₃, it is necessary that every input signal value to the gate G₃ be “1”. Thus, as a result of the implication operation, the output signal values from the logic gates GI and G₂ can be determined to be “1”. Similarly, in order for the output signal values from NAND gates G₁ and G₂ to be “1”, either one of the two inputs to each of NAND gates G₁ and G₂ may be chosen to be “0”. Thus, a signal value for the input terminal x₃ can be determined by the implication operation to be “0”. At this time, the remaining input terminals may have either value of “0” or “1”. In this manner, the implication operation allows a test pattern v1 which applies an initial value of “0” to the output of the faulty gate G₃ to be determined as “xx0xx”. The implication operation is described, for example, in chapter 8 of “design and test of a computer” by Hideo Fujiwara, Kougaku Tosho K.K., 1990.

[0118] Suppose now a stuck-at fault which causes the output from the faulty gate G₃ to be fixed to the initial value of “0” which is set up, and a test pattern v2=“0x11x” which causes the stuck-at fault to propagate to the output of the logic gate G₄ is determined by the implication operation (FIG. 20b). Accordingly, a test pattern sequence which detects the slow-to-rise fault at the gate G₃ by the transient power supply current testing technique is determined to be as T=<v1, v2>=<“xx0xx”, “0x11x”>.

[0119] Alternatively, a test pattern sequence T′=“S0 S0 U1 S1 XX” may be determined by the implication operation (FIG. 20c) which applies a signal “U1” corresponding to the slow-to-rise fault at the output of the faulty gate G₃ and which causes the influence of the slow-to-rise fault to propagate to the output of the logic gate G₄. It is to be noted that the signals “S0”, “S1”, “U0”, “U1” and “XX” are signal values according to the five value logic system which has been developed by C. J. Lin et al. As indicated in FIG. 2, they represent a normally low level signal <“0”, “0”>, a normally high level signal <“1”, “1”>, a signal having a final low level <“x”, “0”>, a signal having a final high level <“x”, “1”>, and a don't care signal <“x”, “x”>, respectively. The implication operation according to the five value logic system is a procedure which is based on a signal value on a signal line within the integrated circuit to set up signal values which are uniquely selected for the input and output signal lines of logic gates which are connected to the signal line in a sequential manner.

[0120] For example, to set up a signal value “U1” at the output of NAND gate G₃, it is necessary that one of input signal values to the gate G₃ be “U0” while the other input signal value be “S1”. It is assumed here that the output signal value of the logic gate G₁ is “S1” and the output signal value of the gate G₂ is “U1”. In order for the output signal value from NAND gate G₁ to be “1”, either input to the gate G₁ may be set up as “S0”. It is assumed that the signal “S0” is applied to the input terminal x₂. On the other hand, in order to set up the output signal value of NAND gate G₂ to be “U0”, one input to the gate G₂ may be chosen to be “U0” while the other input may be chosen to be “S1”. Thus, the signal value on the input terminal x₃ is chosen to be “U0” while the signal value on the input terminal x₄ is chosen to be “S1”. Similarly, in order to cause the influence “U1” of the faulty gate G₃ to be propagated to the output of NOR gate G₄, the other input or the input signal line for the gate G₄ may be chosen to be “S0”. Accordingly, a test pattern sequence T′ which applies a signal “U1” corresponding to the slow-to-rise fault to the output of the faulty gate G₃ and which causes the influence of the slow-to-rise fault to propagate to the output of the logic gate G₄ is determined by the implication operation to be determined as “S0 S0 U1 S1 XX”. As described earlier in the paragraphs of Background of the invention, the five value logic system is described in the literature 1. Consequently, the test pattern sequence which detects the slow-to-rise fault at the gate G₃ by the transient power supply current testing technique is determined to be as T′=“S0 S0 U1 S1 XX”=<v1, v2>=<“0001x”, “0011x”>.

[0121] When the logic gate G₃ has a gate delay fault, the output transition time of the logic gate G₃ will be retarded. When the influence of the fault is caused to be propagated to the next logic gate G₄ (or to the output thereof) by the test pattern sequence T or T′, the transient power supply current waveform of the logic gate G₄ becomes different from a normal condition, thus indicating an abnormality in the transient power supply current of the integrated circuit under test. Accordingly, by applying the test pattern sequence T or T′ and observing whether or not any abnormality occurs in the transient power supply current of the integrated circuit under test, it is possible to determine whether or not there exists a slow-to-rise fault in the logic gate G₃.

[0122] It will be seen from the foregoing that a test pattern sequence which examines a gate delay fault in the integrated circuit under test can be generated. In addition, the method of generating test patterns according to the present invention is not limited to generating test patterns in unit of a gate delay fault, but a test pattern sequence can also be generated in unit of an open fault by assuming the presence of an open fault on a signal line within the integrated circuit.

[0123] Test Pattern Generating Method (for Open Faults)

[0124] A method of generating test patterns according to the first aspect of the present invention with respect to a single open fault will now be described. FIG. 21 shows an example of a CMOS integrated circuit under test. This integrated circuit under test remains the same as the circuit shown in FIG. 20, and there are nine internal signal lines including signal lines m₁ and m₂ between the input terminal x₃ and the gates G₁ and G₂, signal lines m₃ and m₄ between the gates G₁ and G₂ on one hand and a gate G₃, a signal line m₅ on the output side of the gate G₃, signal lines m₆ and m₇ between the signal line m₅ and the gates G₄ and G₅ and signal lines m₈ and m₉ between the gates G₄ and G₅ on one hand and the gate G₆. It will be considered to generate test patterns for an open fault (indicated by × mark) in the signal line m₆. Initially, a test pattern v1=“xx0xx” which applies an initial value of “0” of the slow-to-rise fault to the faulty signal line m₆ is determined by the implication operation to establish signal conditions as indicated in FIG. 21a. A stuck-at fault which fixes the logic value of the faulty signal line m₆ to the established initial value of “0” is then assumed, and test pattern v2=“0x11x” which causes the stuck-at fault to be propagated to the output of the logic gate G₄ is determined by the implication operation, thus establishing signal conditions as illustrated in FIG. 21a. In this manner, a test pattern sequence which detects the open fault on the signal line m₆ according to the transient power supply current testing technique can be determined as T=<v1, v2>=<“xx0xx”, “0x11x”>.

[0125] Alternatively, a test pattern sequence T′=“S0 S0 U1 S1 XX” may be determined by the implication operation which applies a signal “U1” corresponding to the slow-to-rise fault to the faulty signal line m₆ and which causes the influence of the slow-to-rise fault to be propagated to the output of the logic gate G₄ (FIG. 21c). In this manner, a test pattern sequence which detects the open fault on the signal line m₆ according to the transient power supply current testing technique is determined to be as T′=“S0 S0 U1 S1 XX”=<v1, v2>=<“0001x”, “0011x”>.

[0126] When the signal line m₆ has an open fault, the input transition time of the logic gate G₄ increases. When the influence of this fault is propagated to the logic gate G₄ (or to its output) by either test pattern sequence T or T′, the transient power supply current waveform of the logic gate G₄ becomes different from a normal condition, and accordingly, the transient power supply current of the integrated circuit under test exhibits an abnormality. In this manner, by applying the test pattern sequence T or T′ and seeing if there occurs an abnormality in the transient power supply current of the integrated circuit under test, it is possible to determine whether or not an open fault exists on the signal line m₆.

[0127] It will be seen from the foregoing that a test pattern sequence which can be used with an open fault within the integrated circuit under test can be generated. The method of generating test patterns according to the present invention is not limited to generating test patterns in unit of open faults on signal lines which connect between logic gates, but test patterns can also be generated which are effective to detect open faults within the logic gate by assuming the presence of an open fault on a signal line which is disposed within the logic gate.

[0128] In addition, the method of generating test patterns according to the present invention is not limited in its application to combinatorial logic circuits which do not include flipflops, but is equally applicable to sequential circuits including storage elements such as flipflops.

[0129] In addition, the method of generating test patterns according to the present invention is not limited in its application to a CMOS integrated circuit, but is equally applicable to semiconductor integrated circuits of other types.

[0130] I_(DDT) Fault Simulation Technique (for Gate Delay Fault)

[0131] A transient power supply current fault simulation (hereafter referred to as I_(DDT) fault simulation) technique which prepares a detected fault list in unit of gate delay faults will now be described.

[0132]FIG. 22 shows an example of CMOS integrated circuit under test. The integrated circuit under test includes three input terminals x₁, x₂, x₃, two output terminals z₁, z₂, five logic gates G₁, G₂, G₃, G₄, G₅, five internal signal nodes n₁, n₂, n₃, n₄, n₅ and two output buffers G₆, G₇. Specifically, the input terminal x₁ is connected to the input of an inverter logic gate G₁; the input terminals x₂, x₃ are connected to the inputs of NAND logic gate G₂; the outputs from the logic gates G₁ and G₂ are connected to NAND logic gate G₃ through the nodes n₁, n₂; the output of the logic gate G₃ is connected through the node n₃ to the input of the inverter logic gate G₄ and to one input of NOR logic gate G₅; the input terminal x₃ is connected to the other input of the logic gate G₅;, the output of the logic gate G₄ is connected through the node n₄ and the buffer G₆ to the output terminal z₁; and the output of the logic gate G₅ is connected through the node n₅ and the buffer G₇ to the output terminal z₂. While not shown, the logic gates G₁ to G₅ and the output buffers G₆, G₇ have their power supply terminals connected to a common power supply.

[0133] An example of results of the I_(DDT) fault simulation which is performed on the CMOS integrated circuit under test is illustrated in FIG. 23. In FIG. 23, the first column, as counted from the left, represents an identifier of a test pattern sequence. A second column indicates input signals applied to the input terminals x₁, x₂, x₃ of the CMOS integrated circuit under test, and the third column shows signals appearing at the internal signal nodes n₁, n₂, n₃, n₄, n₅ of the CMOS integrated circuit under test when each test pattern sequence is applied. A fourth column indicates signals appearing at the output terminals z₁, z₂ of the CMOS integrated circuit under test when each test pattern sequence is applied. Signals “L”, “H”, “R”, and “F” entered in the second, the third and the fourth column in FIG. 23 represent a normally low level signal <“0”, “0”> (it being understood that a first element within < > represents an initial signal value and a second element represents a final signal value), a normally high level signal <“1”, “1”>, a signal which rises from a low level to a high level <“0”, “1”> and a signal which falls from a high level to a low level <“1”, “0”>, respectively.

[0134] Thus each test pattern sequence comprises two test patterns. For example, a test pattern sequence T1=“LLR” signifies that x₁, x₂, x₃=<“000”, “001”>. A fifth column in FIG. 23 shows a set of gate delay faults which can be detected by the transient power supply current testing technique when each test pattern sequence is applied to the CMOS integrated circuit under test (or a detected fault list). It is to be noted that G₅F represents a falling transition delay fault of the gate G₅ and G₃R represents a rising transition fault of the gate G₃. When a logic gate has a gate delay fault, the output transition time of the logic gate will be retarded. Concomitantly, a logic gate which receives at its input the output from the faulty logic gate will have its timing of the peak of the transient current retarded, and the transient power supply current of the integrated circuit under test exhibits an abnormality. Accordingly, by applying a test pattern sequence and observing whether or not there occurs an abnormality in the transient power supply current, it is possible to determine, when the input test pattern sequence causes a switching operation (either a rising transition or a falling transition) of logic gates, which in turn causes a switching operation of a logic gate or gates which have at its input the output signal lines from the first mentioned logic gates, whether or not these logic gates are faulty.

[0135] By way of example, when the test pattern sequence T2 is applied to the CMOS integrated circuit under test shown in FIG. 22, a switching operation occurs in the logic gates G₂, G₃, G₄, G₅ and the output buffers G₆ and G₇ which are contained in the CMOS integrated circuit under test, producing a falling transition on the signal lines n₂, n₄, n₅ and the output terminals z₁, z₂ while producing a rising transition on the signal line n₃. Accordingly, if there exists a slow-to-fall fault in one of the logic gates G₂, G₄, and G₅ or if a slow-to-rise fault exists in the logic gate G₃, an abnormality in the transient power supply current is observed during the transient power supply current testing which uses the test pattern sequence T2. In this manner, the transient power supply current testing using the test pattern sequence T2 allows a slow-to-fall fault in the logic gates G₂, G₄, and G₅ and a slow-to-rise fault in the logic gate G₃ to be detected. Accordingly, a detected fault list which are provided by the test pattern sequence T2 can be determined to be as {G₂F, G₃R, G₄F, G₅F} by the described I_(DDT) fault simulation. It is to be understood that “F” and “R” represent a slow-to-fall fault and a slow-to-rise fault, respectively.

[0136] In this manner, a detected fault list can be prepared in unit of gate delay faults which can be detected with a given test pattern sequence.

[0137] I_(DDT) Fault Simulation Technique (for Open Faults)

[0138] I_(DDT) fault simulation technique which prepares a fault list in unit of open faults will now be described. FIG. 24 shows an example of CMOS integrated circuit under test. This is the same as shown in FIG. 22, but signal lines connecting between input terminals x₁, x₂, x₃ and logic gates as well as signal lines connecting between the logic gates are identified by signal lines m₁, m₂, . . . , m₁₂. It is to be understood that the signal lines also include input and output signal lines, and any branch line is treated as a distinct signal line. It is also assumed that output signal lines m₁₁, m₁₂ are connected to the output buffers G₆, G₇, respectively.

[0139] An example of results of I_(DDT) fault simulation which is performed upon the CMOS integrated circuit under test is illustrated in FIG. 25. In FIG. 25, the first column, as counted from the left, represents an identifier of a test pattern sequence; the second column shows input signals applied to the input terminals x₁, x₂, x₃ of the CMOS integrated circuit under test; the third column shows signals appearing on signal lines m₁, m₂, . . . , m₁₂ of the CMOS integrated circuit under test when each test pattern sequence is applied; and the fourth column shows signals appearing at the output terminals z₁, z₂ of the CMOS integrated circuit when each test pattern sequence is applied. The signals “L”, “H”, “R”, “F” remains the same as described above in connection with FIG. 23. For example, the test pattern sequence T1=“LLR” signifies that x₁ x₂ x₃=<“000”, “001”>. The fifth column in FIG. 25 shows a set of signal lines having open faults which can be detected during the transient power supply current testing when each test pattern sequence is applied to the CMOS integrated circuit under test, or a detected fault list. When a signal line within the integrated circuit has an open fault, the switching operation of a logic gate which is connected to the faulty signal line at its input will be retarded, and concomitantly, the transient power supply current waveform of the logic circuit will change, whereby an abnormality occurs in the transient power supply current of the integrated circuit under test. Accordingly, by applying a test pattern sequence and observing whether or not an abnormality occurs in the transient power supply current, it is possible to dertermine, when the input test pattern sequence causes a switching operation to occur on a signal line, which in turn causes a switching operation to occur in a logic gate which is connected to the signal line at its input, whether or not the logic circuit is faulty.

[0140] For example, when a test pattern sequence T6 is applied to the CMOS integrated circuit under test shown in FIG. 24, a switching operation occurs on the signal lines m₂, m₇, m₈, m₉, m₁₀, m₁₁ within the CMOS integrated circuit under test, and this in turn causes a switching operation to occur in the logic gates G₂, G₃, G₄ and the output buffer G₆ within the CMOS integrated circuit under test. Accordingly, if an open fault exists in one of the signal lines m₂, m₇, m₈, m₉, m₁₁, an abnormality in the transient power supply current is observed during the transient power supply current testing which uses the test pattern sequence T6. In this manner, the transient power supply current testing which uses the test pattern sequence T6 allows an open fault on the signal lines m₂, m₇, m₈, m₉, M₁₁ to be detected. Consequently, a detected fault list which are obtained with the test pattern sequence T6 can be defined to be {m₂, m₇, m₈, m₉, m₁₁} from I_(DDT) fault simulation. The list of open faults is represented in terms of signal lines on which an open fault is likely to occur.

[0141] It will be seen from the foregoing that a detected fault list can be prepared in unit of open faults which can be detected with a test pattern sequence. I_(DDT) fault simulation technique is not limited in its application to open faults on signal lines which connect between the logic gates, but is also applicable to open faults on signal lines which are disposed within the logic gate, by assuming a fault on a signal line which is disposed within the logic gate.

[0142] A Test Pattern Generating Technique Utilizing I_(DDT) Fault Simulation

[0143] The test pattern generating method according to the first aspect of the invention will now be described. As indicated by the results of I_(DDT) fault simulation mentioned above, a single test pattern sequence can be utilized to detect a plurality of gate delay faults or open faults. Accordingly, when a test pattern sequence which is generated for the sake of a selected fault has successfully detected a different or non-selected fault, it is unnecessary to generate a test pattern for the non-selected fault. Since I_(DDT) fault simulation can be implemented as a logic simulation which determines a logic signal value on an internal signal line relative to an input signal, a required processing time interval is generally shorter than when generating test patterns in order to calculate the input signal from the internal signal value in a reverse manner. Consequently, when test patterns are generated for a selected fault, a non-selected fault which is detected by I_(DDT) fault simulation can be removed from the fault list to be detected, thus allowing the processing time which is required for generating test patterns to be reduced.

[0144] Technique for Preparing a Detected Fault List (for Path Delay Faults)

[0145] A technique for preparing a detected fault list will now be described. FIG. 26 shows an example of a MOS integrated circuit under test. The integrated circuit under test includes four input terminals x₁, x₂, x₃, x₄, two output terminals z₁, z₂. five internal signal nodes n₁, n₂, n₃, n₄, n₅, five logic gates G₁, G₂, G₃, G₄, G₅ and output buffers G₆, G₇. Input terminals x₁ and x₂ are connected to two inputs of NAND gate G₁, the output of which is connected through the signal node n₁ to the input of the inverter gate G₂ and to one input of OR gate G₃. The output from the inverter gate G₂ is connected through the node n₂ to one input of AND gate G₄, and the output from the gate G₃ is connected through the node n₃ to the other input of AND gate G₄ and to one input of AND gate G₅. The input terminal x₃ is connected to the other input of OR gate G₃, and the input terminal x₄ is connected to the other input of AND gate G₅. Outputs from AND gates G₄ and G₅ are connected through the nodes n₄ and n₅, respectively, and further through the output buffers G₆, G₇ to the output terminals z₁ and z₂, respectively. The power supply terminals of the gates G₁ to G₇ are connected to a common power supply, while this is not shown.

[0146] Here it is assumed that the gates G₁, G₂, G₃, G₄, G₅, G₆ and G₇ have gate delays (propagation delays) equal to 1, 1, 3, 2, 1, 1 and 1, respectively. An example of results of a fault simulation which is performed upon the MOS integrated circuit under test is illustrated in FIG. 27. In FIG. 27, the first column, as counted from the left, represents an identifier of a test pattern sequence; the second column shows input signals applied to the input terminals x₁, x₂, x₃, x₄ of the CMOS integrated circuit under test; the third column shows a train of transition signal values which appear on the internal signal nodes n₁, n₂, n₃, n₄, n₅ of the CMOS integrated circuit under test when each test pattern sequence is applied to the input terminals x₁, x₂, x₃, x₄; and the fourth column shows a train of transition signal values which occur on the output terminals z₁, z₂ of the CMOS integrated circuit under test which result from the transition signal values on these nodes. It should be understood that signals “L”, “H”, “R” and “F” represent the same denotations as used in FIGS. 23 and 25. For example, a test pattern sequence T1=“FHHL” signifies that x₁ x₂ x₃ x₄=<“1110”, “0110”>. Numerals entered in parentheses below corresponding signal values represent a transition time of each signal as referenced to the transition time of the signal at the input terminal which is chosen to be 0. For example, R(3) indicates the occurrence of a rising transition signal (“R”) at time 3.

[0147] The fifth column in FIG. 27 shows a set of delay fault paths which can be detected during the transient power supply current testing or a detected fault list when each test pattern sequence is applied to the integrated circuit under test. When the integrated circuit under test has a path delay fault, an output transition time from the faulty path is retarded. Concomitantly, a change in the output transition time of every or any one of logic gates located on the faulty path causes the timing of a peak in the transient current of a next stage logic gate which receives the output from such logic gate at its input to be retarded, whereby the transient power supply current of the integrated circuit under test exhibits an abnormality. Accordingly, by applying a test pattern sequence to the integrated circuit under test and observing whether or not an abnormality occurs in the transient power supply current of the integrated circuit under test, it is possible to determine whether or not a path delay fault has occurred on any signal propagation path on which every logic gate on this path undergoes a switching operation (either rising or falling transition) in response to the input test pattern sequence.

[0148] By way of example, when the test pattern sequence T1 is applied to the CMOS integrated circuit under test, there occurs a transition signal F(1) at the output node n, of the logic gate G, disposed within the CMOS integrated circuit under test, as shown in FIG. 28a. Similarly, signals R(2), R(4) and R(5) occur at the outputs of the logic gates G₂, G₄ and the output buffer G₆, respectively. In this manner, because every logic gate located on a signal propagation path {x₁, n₁, n₂, n₄, z₁} is subject to a switching operation, it follows that whenever there is a path delay fault on the signal propagation path {x₁, n₁, n₂, n₄, z₁}, an abnormality in the transient power supply current is observed during the transient power supply current testing which uses the test pattern sequence T1. In other words, the transient power supply current testing which uses the test pattern sequence T1 allows a path delay fault or faults on the signal propagation path {x₁, n₁, n₂, n₄, z₁} to be detected. In this manner, a detected fault list which can be obtained with the test pattern sequence T1 can be determined by the described fault simulation to be as {{x₁, n₁, n₂, n₄, z₁}}.

[0149] In another example, when a test patterns series T2 is applied to the CMOS integrated circuit under test, a transition signal F(1) occurs at the output node n₁ of the logic gate G₁ within the CMOS integrated circuit under test, and similarly, signals R(2), F(4), R(4) -F(6), R(5)-F(7) occur at the outputs of the logic gates G₂, G₃, G₄ and the output buffer G₆, as shown in FIG. 28b. Since every logic gate located on signal propagation paths {x₁, n₁, n₂, n₄, z₁} and {x₁, n₁, n₃, n₄, z₁} is subject to a switching operation, if there is a path delay fault on either signal propagation path {x₁, n₁, n₂, n₄, z₁} or {x₁, n₁, n₃, n₄, z₁}, an abnormality in the transient power supply current is observed during the transient power supply current testing which uses the test pattern sequence T2. If a path delay time on the signal propagation path {x₁, n₁, n₂, n₄, z₁} increases, the rising transition R(5) at the output signal line z₁ will be retarded, causing a likelihood that a signal transition may not occur at z₁. This prevents the path delay time on the signal propagation path {x₁, n₁, n₂, n₄, z₁} from being determined by the transient power supply current testing, resulting in a failure to detect a path delay fault on the signal propagation path {x₁, n₁, n₂, n₄, z₁}. Thus, a path delay fault or faults which can be detected by the transient power supply current testing which uses the test pattern sequence T2 are only those path delay faults which occur on the signal propagation path {x₁, n₁, n₃, n₄, z₁}. Consequently, a detected fault list which can be determined with the test pattern sequence T2 is determined from the described fault simulation to be {{x₁, n₁, n₃, n₄, z₁}}.

[0150] It will be understood from the foregoing that a detected fault list can be prepared for those path delay faults which can be detected with a given test pattern sequence. A signal propagation path which contains a path delay fault that is to registered with the detected fault list is not limited to a path which extends from the input terminal to the output terminal of the circuit under test, but may also include a signal propagation path such as {x₁, n₁} or {x₁, n₁, n₃} of the semiconductor integrated circuit shown in FIG. 16 which does not reach the output terminal.

[0151] The preparation of the detected fault list is not limited to a CMOS integrated circuit, but is equally applicable to other types of semiconductor integrated circuits.

[0152] Test Pattern Generating Method

[0153] A test pattern generating method according to the second aspect of the present invention will now be described. As shown in the results of the technique of preparing a detected fault list according to the transition simulation illustrated in FIG. 27, a plurality of path delay faults can be detected with a single test pattern sequence T3. Accordingly, when a test pattern sequence which is generated for a particular fault (or selected fault) can detect other faults (non-selected faults), there is no need to generate test patterns which would be required otherwise for these different faults (non-selected faults). Since the transition simulation can be implemented by a logic simulation which determines a logic signal value on an internal signal line with respect to an input signal, the simulation has a fast processing time generally as compared with the generation of test patterns where the input signal is calculated from the internal signal value by a reverse process. Accordingly, the processing time that would be required for generating test patterns can be reduced. In addition, the transient power supply current testing technique on which the second aspect of the present invention is based allows a path delay fault to be efficiently tested if there is a hazard on a signal line or side inputs of the path under test. For example, when a hazard occurs on the output of the path under test {x₁, n₁, n₃, n₄, z₁} as shown in FIG. 28b, the transient power supply current testing technique allows a path delay fault on the path under test to be detected with the test pattern T2. This indicates the possibility that the number of path delay faults which can be detected with a single test pattern sequence can be increased, with consequence that the total number of test pattern sequence which are required to test the path delay faults of the semiconductor integrated circuit under test can be reduced.

[0154] The test pattern generating method according to the second aspect of the present invention is not limited to CMOS integrated circuits, but is equally applicable to other types of semiconductor integrated circuits.

BRIEF DESCRIPTION OF THE DRAWINGS

[0155]FIG. 1a is a circuit diagram of a logic circuit which is used to illustrate a conventional test pattern generating technique;

[0156]FIG. 1b shows patterns, entered at several points in the circuit, which are used to detect a stuck-at fault which is assumed in the circuit shown in FIG. 1a;

[0157]FIG. 2 is a diagram indicating signal values in the five value logic system which is used in the conventional test pattern generating technique;

[0158]FIGS. 3a 1, 3 b 1 and 3 c 1 are logic circuit diagrams and FIGS. 3a 2, 3 b 2 and 3 c 2 are charts indicating the implication tables which are used according to the conventional test pattern generating method with respect to the logic circuits shown in FIGS. 3ba, 3 b 1 and 3 c 1, respectively;

[0159]FIGS. 4a and 4 b are diagrams indicating values of the five value logic system which are applied to one input of AND circuit to activate the circuit, and FIG. 4c is a chart representing a sensitizing table used according to the conventional test pattern generating method;

[0160]FIGS. 5a and 5 b are circuit diagrams indicating logic waveforms illustrating an exemplary test pattern generating method of the prior art;

[0161]FIG. 6 is a circuit diagram of the circuit shown in FIGS. 5a and 5 b, illustrating test patterns applied to the circuit and waveforms appearing therein;

[0162]FIG. 7a graphically shows an input voltage V_(IN) and an output voltage V_(OUT) of a CMOS inverter plotted against time, FIG. 7b graphically shows an exemplary transient response of a power supply current I_(DD), FIG. 7c is a circuit diagram of the MOS inverter circuit, also indicating a power supply current which flows upon a rising transition of the output, and FIG. 7d is a similar view to FIG. 7c, but indicating a power supply current which flows upon a falling transition of the output;

[0163]FIG. 8 graphically shows a typical example of a transient response of a CMOS logic gate, specifically FIG. 8a graphically showing an input voltage V_(IN), an output voltage V_(OUT) and a power supply current I_(S) in the form of a transfer characteristic, and FIG. 8b illustrating an approximated waveform for the transient current;

[0164]FIG. 9a is a circuit diagram of an exemplary CMOS integrated circuit, FIG. 9b graphically illustrates an input voltage to and an output voltage from the integrated circuit, plotted against time, and FIG. 9c graphically shows a corresponding transient power supply current response I_(DDT) plotted against time;

[0165]FIG. 10a is a schematic view of a model of a perfectly open fault, FIG. 10b is an illustration of an exemplary input and output at the location of the fault, FIG. 10c shows a model of a delay open fault, and FIG. 10d illustrates an exemplary input and output with respect to the location of the fault;

[0166]FIG. 11a is a schematic view of an exemplary CMOS integrated circuit having an open fault, and FIGS. 11b and 11 c graphically show exemplary output waveforms in the absence and presence of an open fault;

[0167]FIG. 12 graphically shows an exemplary transient power supply current response of a CMOS integrated circuit having an open fault;

[0168]FIG. 13a is a schematic illustration of the fundamental principle of a path delay fault testing method, FIG. 13b graphically shows an input/output voltage and FIG. 13c illustrates a corresponding system clock;

[0169]FIG. 14 illustrates the principle of the transient power supply current testing method which utilizes the pulse width of the transient power supply current, FIG. 14a graphically showing an input/output voltage plotted against time and FIG. 14b illustrating a transient power supply current plotted against time;

[0170]FIG. 15 is an illustration of the principle of the transient power supply current testing method which utilizes an instantaneous value of the transient power supply current, FIG. 15a graphically illustrating an input/output voltage plotted against time and FIG. 15b illustrating a transient power supply current plotted against time;

[0171]FIG. 16a is a schematic view of a model for a very small open fault which is present on an input signal line of a CMOS inverter, FIG. 16b graphically shows an exemplary output waveform when there is no fault and FIG. 16c graphically shows an exemplary output waveform when there is a fault;

[0172]FIG. 17 graphically shows a change in the integral of the transient power supply current of the CMOS integrated circuit plotted against the resistance of a small open fault which is present in the CMOS integrated circuit;

[0173]FIG. 18 graphically shows a change in the path delay time of a path under test plotted against the resistance of a very small open fault which is present on the path under test of the CMOS integrated circuit;

[0174]FIG. 19 graphically shows a linear relationship between the integral of the transient power supply current of the CMOS circuit and the path delay time of the path under test when the presence of a very small open fault is assumed on the path under test of the CMOS integrated circuit;

[0175]FIGS. 20a, 20 b and 20 c are schematic views showing an exemplary CMOS integrated circuit under test and examples of signals appearing when there is a gate delay fault, illustrating one form of a test pattern generating method according to the first aspect of the present invention;

[0176]FIGS. 21a, 21 b and 21 c are similar views to FIGS. 20a, 20 b and 20 c, illustrating another form of the test pattern generating method according to the first aspect of the present invention;

[0177]FIG. 22 is a circuit diagram of an exemplary CMOS integrated circuit under test which is used to illustrate I_(DDT) fault simulation used in the test pattern generating method according to the first aspect of the present invention;

[0178]FIG. 23 is a chart showing results of I_(DDT) fault simulation used in the test pattern generating method according to the first aspect of the present invention;

[0179]FIG. 24 is a circuit diagram of another exemplary CMOS integrated circuit under test which is used to illustrate I_(DDT) fault simulation used in the test pattern generating method according to the first aspect of the present invention;

[0180]FIG. 25 is a chart showing results of I_(DDT) fault simulation applied to the circuit shown in FIG. 24;

[0181]FIG. 26 is a circuit diagram of a CMOS integrated circuit under test which is used to illustrate a fault simulation method according to the second aspect of the present invention;

[0182]FIG. 27 is a chart showing results of the fault simulation applied to the circuit shown in FIG. 26;

[0183]FIGS. 28a and 28 b are similar circuit diagrams as shown in FIG. 26, but illustrating various signal waveforms entered in the circuit diagrams to describe the method according to the second aspect of the present invention utilizing the results of the fault simulation shown in FIG. 27;

[0184]FIG. 29 is a flow chart of an exemplary processing procedure for the test pattern generating method according to the first aspect of the present invention;

[0185]FIG. 30 is a flow chart of another processing procedure for the test pattern generating method according to the first aspect of the present invention;

[0186]FIG. 31 is a schematic illustration of an apparatus according to the present invention which comprises a client system and a plurality of server systems;

[0187]FIG. 32 is a flow chart of an exemplary processing procedure which occurs on the client side in the test pattern generating method according to the first aspect of the present invention;

[0188]FIG. 33 is a flow chart of an exemplary processing procedure which occurs on the server side and which relates to the processing procedure occurring on the client side shown in FIG. 32;

[0189]FIG. 34 is a flow chart of another processing procedure which occurs on the client side according to the test pattern generating method according to the first aspect of the present invention;

[0190]FIG. 35 is a flow chart of an exemplary processing procedure which occurs on the server side and which is related to the client side processing procedure shown in FIG. 34;

[0191]FIG. 36 is a flow chart of a further processing procedure for the test pattern generating method according to the first aspect of the present invention;

[0192]FIG. 37 is a flow chart of yet another processing procedure for the test pattern generating method according to the first aspect of the present invention;

[0193]FIG. 38 is a flow chart of a further processing procedure which occurs on the client side for the test pattern generating method according to the first aspect of the present invention;

[0194]FIG. 39 is a flow chart of a processing procedure which occurs on the server side and which is related to the client side processing procedure shown in FIG. 38;

[0195]FIG. 40 is a flow chart of still another processing procedure which occurs on the client side for the method according to the first aspect of the present invention;

[0196]FIG. 41 is a flow chart of a processing procedure which occurs on the server side and which is related to the client side processing procedure shown in FIG. 40;

[0197]FIG. 42 is a flow chart of a still further processing procedure which occurs on the client side for the method according to the first aspect of the present invention;

[0198]FIG. 43 is a flow chart of a processing procedure which occurs on the server side and which is related to the client side processing procedure shown in FIG. 42;

[0199]FIG. 44 is a flow chart of a different processing procedure which occurs on the client side for the method according to the first aspect of the present invention;

[0200]FIG. 45 is a flow chart of a still different processing procedure which occurs on the client side for the method according to the first aspect of the present invention;

[0201]FIG. 46 is a flow chart of an exemplary processing procedure for the method according to the second aspect of the present invention;

[0202]FIG. 47 is a flow chart of a specific example of the step of preparing a detected fault list shown in FIG. 46;

[0203]FIG. 48 is a flow chart of an exemplary processing procedure which occurs on the client side for the method according to the second aspect of the present invention;

[0204]FIG. 49 is a flow chart of a processing procedure which occurs on the server side and associated with the client side processing procedure shown in FIG. 48;

[0205]FIG. 50 is a flow chart of another processing procedure which occurs on the client side for the method according to the second aspect of the present invention;

[0206]FIG. 51 is a flow chart of a processing procedure which occurs on the server and associated with the client side processing procedure shown in FIG. 50;

[0207]FIG. 52 is a flow chart of a further processing procedure which occurs on the client side for the method according to the second aspect of the present invention;

[0208]FIG. 53 is a flow chart of a processing procedure which occurs on the server side and which is associated with the client side processing procedure shown in FIG. 52;

[0209]FIG. 54 is a flow chart of still another processing procedure which occurs on the client side for the method according to the second aspect of the present invention;

[0210]FIG. 55 is a flow chart of a processing procedure which occurs on the server side and which is associated with the client side processing procedure shown in FIG. 54;

[0211]FIG. 56 is a block diagram showing an exemplary functional arrangement of an apparatus which implements the method according to the first aspect of the present invention;

[0212]FIG. 57A is a block diagram showing an exemplary functional arrangement of a client system which implements the method according to the first aspect of the present invention;

[0213]FIG. 57B is a block diagram showing an exemplary functional arrangement of a server system which implements the method according to the first aspect of the present invention;

[0214]FIG. 58 is a block diagram showing an exemplary functional arrangement of an apparatus which implements the method according to the second aspect of the present invention;

[0215]FIG. 59A is a block diagram showing a functional arrangement of a client system which implements the method according to the second aspect of the present invention; and

[0216]FIG. 59B is a block diagram showing a functional arrangement of a server system which implements the method according to the second aspect of the present invention.

DESCRIPTION OF EMBODIMENTS

[0217] Several embodiments of the present invention will now be described.

[0218]FIG. 29 shows a processing procedure for a test pattern generating method according to an embodiment of the first aspect of the present invention. Initially, at step 101, a fault list in which all faults of a semiconductor integrated circuit under test are registered is prepared. The preparation of the fault list may take place by manually enumerating slow-to-fall faults (GF) and slow-to-rise (GR) for all logic gates, for example, in the semiconductor integrated circuit under test in a sequential manner, or by automatically deriving each logic gate (each internal signal line) by an electronic computer on the basis of circuit information. At next step 102, one of the faults in the list is selected for which test patterns are to be generated. At step 103, an attempt is made to determine, by the implication operation, an initialization test pattern v1 which applies an initial value to a fault location corresponding to the selected fault in order to activate the fault. At step 104, a confirmation is made to see whether or not the implication operation which attempted to generate the initialization test pattern v1 has successfully generated an initialization test pattern without causing any conflict with logic signals on input signal lines and internal signal lines of the semiconductor integrated circuit under test. If the initialization test pattern could have been generated without introducing a conflict, the operation proceeds to step 105, while if the initialization test pattern could not have been generated without producing a conflict, the operation transfers to step 108.

[0219] Thus, when the generation of the initialization test pattern v1 is attempted at step 103 by the implication operation, and has successfully generated it, the initialization test pattern is generated without causing any conflict at step 104.

[0220] At step 105, it is assumed that the fault location has a stuck-at fault which causes the output to be stuck at the initial value, and an attempt is made to determine, by the implication operation, a propagation test pattern v2 which causes the stuck-at fault to propagate to the output of a following logic gate which input is connected to the fault location. At step 106, a confirmation is made to see whether or not the implication operation which tried to generate the propagation test pattern v2 has successfully produced a propagation test pattern without introducing any conflict with logic signals on input signal lines and internal signal lines of the semiconductor integrated circuit under test. If the propagation test pattern has been successfully produced, the operation proceeds to step 107, while if the attempt failed to produce the propagation test pattern, the operation transfers to step 108.

[0221] At step 107, a test pattern sequence T=<v1, v2> is assembled from the initialization test pattern v1 and propagation test pattern v2 which are determined at steps 103 and 105, and the test pattern sequence T is registered with a test pattern list. Finally, at step 108, a confirmation is made to see whether or not there remains any fault which is not yet processed in the fault list. If there is an unprocessed fault, the steps 102, 103, 104, 105, 106, 107 and 108 are repeated. However, if there remains no unprocessed fault, the operation is completed. The test pattern generating method mentioned above may choose a gate delay fault or an open fault for the selected fault for which test patterns are to be generated.

[0222]FIG. 30 shows a processing procedure according to another embodiment for the test pattern generating method according to the first aspect of the present invention. Initially, at step 201, a fault list which registers every fault in a semiconductor integrated circuit under test is prepared. At next step 202, one of the faults for which test patterns are to be generated is selected from the list. At step 203, an attempt is made to determine, by the implication operation, a test pattern sequence T′ which applies a signal value according to the five value logic system to a fault location corresponding to the selected fault to activate the fault and which causes the signal value to propagate to the output of a following logic gate which input is connected at its input to the fault location. At step 204, a confirmation is made to see whether or not the implication operation has successfully generated a test pattern sequence T without introducing a conflict with logic values on input signal lines and internal signal lines of the semiconductor integrated circuit under test. If the test pattern sequence T has been successfully generated, the operation proceeds to step 205, while if the implication operation has failed to generate the test pattern sequence T′, the operation transfers to step 206. At step 205, the test pattern sequence T′ which is determined at step 203 is registered with a test pattern list. Finally, at step 206, a confirmation is made to see whether or not there is any other fault in the list which is not yet processed. When there remains an unprocessed fault, the steps 202, 203, 204, 205 and 206 are repeated. If there remains no unprocessed fault, the operation is completed. The test pattern generating method mentioned above may choose a gate delay fault or an open fault for the selected fault for which test patterns are to be generated.

[0223] A method of generating test patterns by a cooperation between a client system and server systems will now be described. A client system 10 and a plurality of server systems 20 are connected together through a communication channel 30 as shown in FIG. 31. This arrangement can be constructed as a so-called LAN (local area network). In the description to follow, the client system will be simply referred to as a client and the server system as a server.

[0224]FIG. 32 shows a processing procedure for the client system 10 in another embodiment of the test pattern generating method according to the first aspect of the present invention. Initially, at step 301, a client (an electronic computer which manages test patterns) prepares a fault list in which every fault in a semiconductor integrated circuit under test is registered. At next step 302, the client divides the fault list into a plurality of fault sub-list which are transmitted to the plurality of servers. Subsequently, at step 303, the client waits for a test pattern sequence which will be returned from each server. When a test pattern sequence T is returned, the test pattern sequence T is registered with a test pattern list at step 304. Finally, at step 305, the client confirms whether or not all of the servers have completed generating test patterns. If the server operation has not been completed, the steps 303, 304 and 305 are repeated, and when all of the servers have completed the processing, the operation is completed.

[0225] On the other hand, as shown in FIG. 33, each server receives a fault sub-list which is transmitted from the client and stores it in storage means at step 401. At next step 402, the server selects one of the faults for which test patterns are to be generated from the fault sub-list stored in the storage means. At step 403, the server attempts to determine, by the implication operation, an initialization test pattern v1 which applies an initial value to a fault location corresponding to the selected fault in order to activate the fault. At step 404, the server confirms whether or not the implication operation which is intended to generate the initialization test pattern has successfully generated the initialization test pattern without introducing a conflict with logic signals on input signal lines and internal signal lines within the semiconductor integrated circuit under test. If the initialization test pattern has been successfully generated, the operation proceeds to step 405, while if the initialization operation has failed to generate the initialization test pattern, the operation transfers to step 408.

[0226] At step 405, the server assumes a stuck-at fault at the fault location which causes the output to be fixed to the initial value, and then attempts to determine, by the implication operation, a propagation test pattern v2 which causes the stuck-at fault to be propagated to the output of a next stage logic gate which is connected at its input to the fault location. At step 406, a confirmation is made by the server to see whether or not the implication operation which is intended to generate the propagation test pattern v2 has successfully generated a propagation test pattern without introducing a conflict with logic signals on input signal lines and internal signal lines of the semiconductor integrated circuit under test. If the propagation test pattern has been successfully generated, the operation proceeds to step 407, while if the implication operation failed to generate the propagation test pattern, the operation transfers to step 408. At step 407, the server forms a test pattern sequence T=<v1, v2> from the initialization test pattern v1 and the propagation test pattern v2 which are determined at steps 403 and 405, and returns the test pattern sequence T to the client. Finally, at step 408, a confirmation is made by the server to see if there remains any other unprocessed fault in the fault sub-list which is stored in the storage means. If there remains an unprocessed fault, the steps 402, 403, 404, 405, 406, 407 and 408 are repeated. However, if there remains no unprocessed fault, the server reports the completion of generating test patterns to the client, thus completing its operation. When the plurality of servers generate test pattern sequence in this manner, the overall processing speed can be improved. The test pattern generating method mentioned above may choose a gate delay fault or an open fault for the selected fault for which test patterns are to be generated.

[0227]FIG. 34 shows a processing procedure which takes place by the client in a further embodiment of the test pattern generating method according to the first aspect of the present invention. Initially, at step 501, the client prepares a fault list in which every fault in a semiconductor integrated circuit under test is registered. At step 502, the client divides the fault list into a plurality of fault sub-lists, which are transmitted to a plurality of servers. Subsequently, at step 503, the client waits for a test pattern sequence which will be returned by each server. A returned test pattern sequence T′ is registered with a test pattern list at step 504. Finally, at step 505, the client confirms whether or not all the servers have completed generating test patterns. If all the servers have not completed the generation of test pattern sequence, the steps 503, 504 and 505 are repeated, and when all the servers have completed the generation of test patterns, the operation is completed.

[0228] On the other hand, as shown in FIG. 35, at step 601, each server receives a fault sub-list which is transmitted from the client and stores it in storage means. At next step 602, the server selects one of the faults, for which test patterns are to be generated, from the fault sub-list stored in storage means. Subsequently, at step 603, the server attempts to determine, by the implication operation, a test pattern sequence T′ which applies a signal value according to the five value logic system to a fault location corresponding to the selected fault in order to activate the fault and for causing the signal value to be propagated to the output of a next stage logic gate which is connected at its input to the fault location. At step 604, a confirmation is made by the server to see whether or not the implication operation which is intended to generate the test pattern sequence T′ has successfully generated the test pattern sequence T′ without introducing a conflict with signal values on input signal lines and internal signal lines of the semiconductor integrated circuit under test. If the test pattern sequence T′ has been successfully generated, the operation proceeds to step 605, while if the implication operation has failed to generate the test pattern sequence T′, the operation transfers to step 606. At step 605, the server returns the test pattern sequence T′ which is determined at step 603 to the client. Finally, at step 606, a confirmation is made to see whether or not any other unprocessed fault remains in the fault sub-list stored in the storage means. If there remains an unprocessed fault, the steps 602, 603, 604, 605 and 606 are repeated. However, if there remains no unprocessed fault, the server reports the completion of generating test patterns to the client, thus completing its operation. The test pattern generating method mentioned above may choose a gate delay fault or an open fault for the selected fault for which test patterns are to be generated.

[0229]FIG. 36 shows a processing procedure according to still another embodiment of the test pattern generating method according to the first aspect of the present invention. This processing procedure is substantially similar to the embodiment shown in FIG. 29 except that the step 107 where the initialization test pattern v1 and the propagation test pattern v2 determined at steps 103 and 105 are combined together to define the test pattern sequence T=<v1, v2>, which is then registered with the test pattern list, is followed by a step 701 where the test pattern sequence T determined at step 107 is used to perform a transient power supply current fault simulation (I_(DDT) fault simulation) to prepare a fault list which can be detected with the test pattern sequence (a detected fault list). Then follows a step 702 where those faults which are contained in the detected fault list which is prepared at step 701 are deleted from the fault list prepared at step 101. Finally, at step 108, a confirmation is made to see whether or not any other fault which has not yet been processed or deleted remains in the fault list. When a fault which has not yet been processed or deleted remains, the steps 102, 103, 104, 105, 106, 107, 701, 702 and 108 are repeated. However, if there remains no fault which has not been processed or deleted, the operation is completed. The deletion described above promotes the completion of generating test patterns. The test pattern generating method mentioned above may choose a gate delay fault or an open fault for the selected gate for which test patterns are to be generated. The registration at step 107 and the deletion at steps 701 and 702 may be interchanged in order.

[0230]FIG. 37 shows a processing procedure according to yet another embodiment of the test pattern generating method according to the first aspect of the present invention. This processing procedure is equivalent to the processing procedure shown in FIG. 30, to which the additional processing operation which took place in FIG. 36 with respect to FIG. 29 is added. Namely, as a distinction from FIG. 30, after step 205 where the test pattern sequence T′ is registered with the test pattern list, there follows a step 801 where the test pattern sequence T′ determined at step 203 is used to perform a transient power supply current fault simulation (I_(DDT) fault simulation) to prepare a fault list which can be detected with the test pattern sequence (a detected fault list). Then follows a step 802 where the faults contained in the detected fault list which is prepared at step 801 are deleted from the fault list which is prepared at step 201. Finally, at step 206, a confirmation is made to see whether or not there remains any other fault which has not yet been processed or deleted in the fault list. If there remains a fault which has not been processed or deleted, the steps 202, 203, 204, 205, 801, 802 and 206 are repeated. However, if there remains no fault which has not been processed or deleted, the operation is completed. The test pattern generating method mentioned above may choose a gate delay fault or an open fault for the selected gate for which test patterns are to be generated. The registration at step 205 and the deletion at steps 801 and 802 may be interchanged in order.

[0231]FIGS. 38 and 39 show a processing procedure according to a yet further embodiment of the test pattern generating method according to the first aspect of the present invention. A difference over the embodiment shown in FIGS. 32 and 33 will be principally dealt with. After preparing a fault list at step 301, the client activates or starts a plurality of servers for generating test patterns at step 901. At next step 303, the client waits for test pattern sequence which will be returned from each server. When a test pattern sequence T is returned, the client registers the test pattern sequence T with a test pattern list at step 304. At next step 902, the client performs a transient power supply current fault simulation (I_(DDT) fault simulation) using the test pattern sequence T to prepare a fault list which can be detected with the test pattern sequence (a detected fault list). At next step 903, the client deletes the faults contained in the detected fault list which is prepared at step 902 from the fault list which is prepared at step 301, and then proceeds to step 305. The registration at step 304 and the deletion at steps 902 and 903 may be interchanged in order. At step 305, when there is no fault in the fault list which has not been selected, all of the servers which are not engaged with generating test patterns are successively deactivated.

[0232] As shown in FIG. 39, when activated by the client, each server selects one of the faults for which test patterns are to be generated, from the fault list which is maintained by the client at step 1001. Subsequently, an initialization test pattern v1 and a propagation test pattern v2 which are used to detect the selected fault are determined and are combined together to define a test pattern sequence T==<v1, v2>, which is then returned to the client in the similar manner as described above in connection with FIG. 33. After returning the test pattern sequence at step 407, the server finally makes a confirmation at step 1002 to see whether or not there remains any other fault in the fault list maintained by the client which has not yet been processed or deleted. If there remains a fault which has not been processed or deleted, the steps 1001, 403, 404, 405, 406, 407 and 1002 are repeated. However, if there remains no fault which has not been processed or deleted, the operation of generating test patterns is completed. The test pattern generating method mentioned above may choose a gate delay fault or an open fault for the selected fault for which test patterns are to be generated. In FIGS. 38 and 39, at the same time as the client activates the servers, the client transmits a selected fault, one each for the server, from the fault list, and when a test pattern sequence is returned from the server, the client registers it, prepares a detected fault list which takes place by the simulation, and deletes the fault contained in the detected fault list from the fault list. Subsequently, the client selects one of unprocessed faults from the fault list and transmits it to the server. In the event it is found that there remains no unprocessed fault in the fault list when the registration, the preparation of the detected fault list and the deletion have been completed for a test pattern sequence which is returned from the server, the client immediately notifies the servers to this effect, whereupon the servers complete their operations. Alternatively, when there is no unprocessed fault in the fault list and when the client has received a last test pattern sequence which is returned from each server, it may register to this effect and complete its operation.

[0233]FIGS. 40 and 41 show different processing procedures used by the client and servers in carrying out the test pattern generating method according to the first aspect of the present invention. This represents a modification of the embodiment shown in FIGS. 34 and 35 in the same manner as the embodiments shown in FIGS. 32 and 33 are modified into the embodiments shown in FIGS. 38 and 39. Accordingly, steps shown in FIGS. 40 and 41 which perform the same function as certain steps in FIGS. 38 and 39 are designated by like reference numerals as used before without repeating their descriptions. Again, this test pattern generating method may choose a gate delay fault or an open fault for the selected fault. In addition, the registration with the test pattern list and deletion from the fault list which are performed by the client may be interchanged in order.

[0234] An embodiment of the first aspect of the present invention using a plurality of servers in which the client selects a fault for which test patterns are to be generated and confirms the presence of an unprocessed fault will now be described with reference to FIG. 42 which shows a processing procedure which occurs on the client and FIG. 43 which shows a processing procedure which occurs on the server.

[0235] On the client side, a fault list is prepared at step 301, and a plurality of servers are activated at step 901. At subsequent step 1201, the client examines if it has received a request for a fault to be processed from one of the servers. If it has received the request, at step 1202, the client selects one of faults from the fault list, and transmits it to the requesting server. At next step 303, the client examines if there has been returned a test pattern sequence from the server. If there has been returned a test pattern sequence, the client registers the test pattern sequence with the test pattern list at step 304. At next step 1203, the client examines if there remains any fault within the fault list which has not been processed. If there is, the operation returns to step 1201.

[0236] If it is found at step 1201 that the client has not received any request for a fault, the operation transfers to step 303. If it is found at step 303 that no test pattern sequence has been returned, the operation transfers to step 1203. If it is found at step 1203 that there is no unprocessed fault which remains in the fault list, the client notifies each server the completion of operation, and ceases to operate.

[0237] Referring to FIG. 43, on the server side, when it is activated by the client, it requests the client to transmit a fault to be processed at step 1301. At step 1302, the server waits for the selected fault which is to be transmitted from the client. When the selected fault is received, it executes steps 403 to 407 shown in FIG. 33. Specifically, it attempts to determine the initialization test pattern v1 and the propagation test pattern v2 by the implication operation. If these test patterns are determined, the resulting test pattern sequence T=<v1, v2> is returned to the client. After returning the test pattern sequence or if the server failed to generate the test pattern sequence, it examines to see if a notification of the completion operation has been received from the client at step 1303. If such notification has not been received, the operation returns to step 1301, and if it has received the notification, it ceases to operate.

[0238] In an embodiment in which each server selects a fault for which test patterns are to be generated and confirms the presence of an unprocessed fault, a processing procedure to be followed by the client may be as shown in FIG. 44 where steps 902 and 903 shown in FIG. 38 are omitted. A processing procedure followed by the server remains substantially the same as shown in FIG. 39. However, at step 1002 shown in FIG. 39, an examination is made to see whether there remains any fault in the fault list which has not been processed, and accordingly, the deletion of a fault or faults from the fault list is not carried out as a result of the omission of steps 902 and 903 on the client side.

[0239] In the embodiment shown in FIGS. 42 and 43 where a test pattern sequence T returned from the server is used to perform a fault simulation, a detected fault list is prepared and faults contained in the detected fault list are deleted from the fault list, the client operates according to a processing procedure shown in FIG. 45. In this instance, in the processing procedure shown in FIG. 42, steps 902 and 903 shown in FIG. 38 are executed subsequent to step 304 before transferring to step 1203. The processing procedure followed by the server in this instance is the same as the procedure shown in FIG. 43.

[0240] In the embodiments described above with reference to FIGS. 42 to 45, the test pattern sequence has been generated by determining the initialization test pattern and the propagation test pattern. However, as shown in the embodiment of FIGS. 40 and 41, signal values according to the five value logic system may be employed to generate a test pattern sequence T′.

[0241]FIG. 46 shows a processing procedure for the test pattern generating method according to the second aspect of the present invention. Initially, at step 2101, a fault list in which every path delay fault for a semiconductor integrated circuit under test is registered is prepared. The fault list may be prepared by manually tracing a circuit to pick up every path delay fault (or any path which is likely to cause a delay fault) or by enumerating path delay faults by an electronic computer on the basis of circuit information for the semiconductor integrated circuit under test. At step 2102, a test pattern sequence comprising two or more test patterns and which is to be applied to the semiconductor integrated circuit under test is generated. At next step 2103, a transition simulation is performed with the test pattern sequence to calculate a train of transition signal values which occur on signal lines within the semiconductor integrated circuit under test. At step 2104, the transition signal values on various signal lines which are calculated by the transition simulation are used to prepare a list of path delay faults which can be detected by the transient power supply current testing which uses the test pattern sequence (or a detected fault list). At next step 2105, a confirmation is made to see if a fault or faults which are contained within the detected fault list exist in the fault list prepared at step 2101. If faults contained in the detected fault list exist in the fault list, the operation proceeds to step 2106. However, if a fault contained in the detected fault list does not exist in the list of fault, the steps 2102, 2103, 2104 and 2105 are repeated.

[0242] At step 2106, a fault or faults contained in the detected fault list are deleted from the fault list which is prepared at step 2101. At next step 2107, the test pattern sequence is registered with a test pattern list. At final step 2108, a confirmation is made to see if the fault list is empty. If the fault list is not empty, the steps 2102, 2103, 2104, 2105, 2106, 2107 and 2108 are repeated. If the fault list is empty, the operation is complete. At step 2102 where a test pattern sequence is generated, two or more random patterns may be generated as a test pattern sequence, or one from a group of previously generated test pattern sequence may be selected. In addition, at step 2108 where a confirmation is made to see if the fault list is empty, a decision may be rendered to complete the operation by confirming that the number of faults which remain in the fault list is equal to or less than a given number (a positive number including 0). However, in order to improve the path delay fault detection rate for the semiconductor integrated circuit under test, it is desirable that the threshold value mentioned above may be chosen as small as possible. It will be understood that as the number of remaining path delay faults is reduced, it takes time to obtain a test pattern sequence which is capable of detecting such remaining fault. On the other hand, depending on the circuit requirement, the fault detection rate demanded may be above a certain level such as 99% or above, for example. The number of remaining path delay faults may be increased in consideration of such demand so as to satisfy the requirement.

[0243]FIG. 47 shows a processing procedure for preparing a detected fault list at step 2104 in FIG. 46. Initially, at step 2201, an initialization is made by selecting one path delay fault which may occur in the semiconductor integrated circuit under test from the fault list which is prepared at step 2101 shown in FIG. 46. At next step 2202, a confirmation is made to see if every logic gate on a path having the path delay fault (faulty path) is subject to a switching operation on the basis of the result of the transition simulation. If every logic gate on the faulty path is subject to a switching operation, the operation proceeds to step 2203, but if there is some logic gate which is not subject to a switching operation, the operation transfers to step 2206.

[0244] At step 2203, a confirmation is made to see whether or not there exists a logic gate on the faulty path which undergoes a switching operation a plurality of times in response to the test pattern sequence which is generated at step 2102 in FIG. 46 on the basis of the result of the transition simulation. If there exists a logic gate which undergoes a switching operation a plurality of times, the operation proceeds to step 2204, but if a logic gate which undergoes a switching operation a plurality of times does not exist, the path delay fault is registered with the detected fault list at step 2205. At step 2204, a confirmation is made to see if an on-path input of any logic gate (an input signal line of the logic gate which is located on the faulty path) which undergoes a switching operation a plurality of times satisfies a fault detecting requirement according to the transient power supply current testing. If the on-path input satisfies the fault detection requirement according to the transient power supply current testing, the path delay fault is registered with the detected fault list at step 2205. If the on-path input does not satisfy the fault detection requirement according to the transient power supply current testing, the operation transfers to step 2206.

[0245] At step 2204, a confirmation is made to see whether or not an output transition signal from the logic gate which corresponds to the on-path input to the logic gate is a transition signal of the same kind as the final transition signal appearing on the output signal line of the logic gate. This confirmation is made to every logic gate which undergoes a switching operation a plurality of times. By way of example, the logic gate G₄ shown in FIG. 28b is an example which undergoes a switching operation a plurality of times. An output transition signal “F(6)” from the gate G₄ which corresponds to the input transition signal “F(4)” on the on-path input n₃ to the gate G₄ coincides with a final transition signal from the logic gate G₄, and accordingly, the on-path input n₃ satisfies the fault detection requirement according to the transient power supply current testing. At final step 2206, a confirmation is made to see whether or not any other unprocessed path delay fault exists. If an unprocessed path delay fault exists, a next possible path delay fault is presumed at step 2207 and the steps 2202, 2203, 2204, 2205 and 2206 are repeated. However, if there is no other unprocessed path delay fault, the operation is completed.

[0246]FIGS. 48 and 49 show processing procedures followed by the client and the server, respectively, in another embodiment of the test pattern generating method according to the second aspect of the present invention. Referring to FIG. 48 showing the processing procedure followed by the client, it initially prepares a fault list in which every path delay fault possible with a semiconductor integrated circuit under test is registered at step 2301. At next step 2302, the client generates a test pattern sequence comprising two or more test patterns which is to be applied to the semiconductor integrated circuit, and transmits a test pattern sequence, one each for one or more servers which are not engaged with the processing operation. Subsequently, at step 2303, the client waits for a notification indicating the completion of operation from the plurality of servers. Upon receiving the notification, the operation of the client proceeds to step 2304. At step 2304, the client confirms whether or not the fault list is empty, and if the fault list is not empty, it repeats the steps 2302, 2303 and 2304. However, if the fault list is empty, it aborts the operation of every server at step 2305, thus ceasing to operate.

[0247] On the other hand, referring to FIG. 49, the server performs a transition simulation with the test pattern sequence which is transmitted from the client at step 2401, thus calculating a train of transition signal values appearing on signal lines within the semiconductor integrated circuit under test. At next step 2402, the server uses the transition signal values on various signal lines which are calculated by the transition simulation to prepare a fault list which can be detected by the transient power supply current testing which uses the test pattern sequence (a detected fault list). At step 2403, the server confirms whether or not a fault or faults contained in the detected fault list which is prepared at step 2402 exist in the fault list (which is prepared at step 2301 and) maintained by the client. If a fault or faults contained in the detected fault list exist in the fault list, the operation proceeds to step 2404. However, if a fault contained in the detected fault list does not exist in the fault list, the operation transfers to step 2406.

[0248] At step 2404, the server deletes a fault or faults contained in the detected fault list from the fault list. At subsequent step 2405, the server registers the test pattern sequence with the test pattern sequence list which is maintained by the client. Finally, at step 2406, the server notifies the client the completion of its operation, thus ceasing to operate.

[0249] At step 2302 shown in FIG. 48 where a test pattern sequence is generated, two or more random patterns may be generated as a test pattern sequence, or one from a group of previously generated test pattern sequence may be selected. At step 2402 in FIG. 49 where a detected fault list is prepared, such list may be prepared by using the technique of preparing a detected fault list as illustrated in FIG. 47. At step 2304 shown in FIG. 48 where a confirmation is made to see if the fault list is empty, a decision may be rendered to complete the operation by confirming whether or not the number of faults which remain in the fault list has reduced below a given number (a threshold value). However, it is desirable that the threshold value be chosen as small as possible in order to improve the path delay fault detection rate for the semiconductor integrated circuit under test.

[0250] An embodiment in which a server derives a test pattern sequence from a client for processing it when using a client and a plurality of servers which are operated according to the second aspect of the invention will now be described. A processing procedure followed by the client is shown in FIG. 50. At step 2301, a list of path delay faults for a semiconductor integrated circuit under test (a fault list) is prepared. Then follows a step 1401 where a generated pattern list or a list of test pattern sequence comprising two or more test patterns and which is applied to the semiconductor integrated circuit under test is prepared. At subsequent step 2901, the client activates a plurality of servers. At next step 1402, the client waits for test pattern sequence from the plurality of servers to be registered with a test pattern sequence list. At step 1403, the client repeats the steps 1402 and 1403 until the number of path delay faults which remain in the fault list is reduced below a given value or until all the servers cease to operate. When the fault list becomes empty or when the servers cease to operate, the client aborts the operation of each server at step 1406, thus ceasing to operate.

[0251] As shown in FIG. 51, when activated by the client, each server selects one of test pattern sequence from the generating pattern list which is maintained by the client at step 1404. Subsequently, the server executes steps 2401 to 2405 shown in FIG. 49 and prepares a fault list (a detected fault list) which can be detected by the transient power supply current testing using the selected test pattern sequence, deletes these faults from the fault list maintained by the client, and registers the test pattern sequence with the test pattern sequence list maintained by the client. Subsequently, at step 1405, the server examines if there exists a test pattern sequence which is not yet selected in the generated pattern list of the client. If such test pattern sequence exists, the operation returns to step 1404, but if such test pattern sequence does not exist, the operation proceeds to step 2406 where it ceases to process the test patterns generated and notifies the client the completion of its operation.

[0252] In another embodiment in which the generation of a test pattern sequence which is used to detect a path delay fault is shared by a client and a plurality of servers, a processing procedure followed by the client is shown in FIG. 52 and a processing procedure followed by the server is shown in FIG. 53. In a similar manner as shown in FIG. 50, the client prepares a list of path delay faults and prepares a list of test pattern sequence (a generated pattern list) at steps 2301 and 1401. In this embodiment, the list of test pattern sequence (or the generated pattern list) is divided into a plurality of pattern sequence sub-lists at step 1501, thus transmitting the pattern sequence sub-lists to the servers in a distributed manner so that each server receives one sub-list. The subsequent operation tales place in the similar manner as shown in FIG. 50. On the other hand, referring to FIG. 53, the server receives the test pattern sequence sub-list from the client at step 1502, once stores it in its memory, and selects one test pattern sequence from the test pattern sequence sub-list at step 1503. Subsequently, the server executes steps 2401 to 2405 shown in FIG. 51, and then examines whether there exists any test pattern sequence which is not yet processed in the test pattern sequence sub-list which is stored in the memory. If an unprocessed test pattern sequence exists, the operation returns to step 1503, but if it does not exist, the server notifies the client the completion of its operation the step 2406. In FIGS. 46, 49 and 51, it is to be noted that the deletion from the fault list and the registration to the test pattern sequence list may be interchanged in order.

[0253] In FIGS. 49, 51 and 53, the deletion of faults from the fault list maintained by the client and the registration of a test pattern sequence with the test pattern sequence list are performed by the server, as indicated at steps 2404 and 2405, but the detected fault list and the test pattern sequence which is used in preparing the list may be transmitted to the client at each of these steps so that the client performs the deletion of faults and the registration with the test pattern sequence list. An example in which the embodiment of FIGS. 50 and 51 is modified in this manner is shown in FIGS. 54 and 55. As shown in FIG. 54, after activating the servers at step 2901, the client waits for the reception of the detected fault list and test pattern sequence from the servers at step 1601. Upon reception of these, the client deletes a fault or faults contained in the received detected fault list from the fault list at step 1602, and registers the received test pattern sequence with a test pattern sequence list at step 1603 and then proceeds to step 1403.

[0254] As shown in FIG. 55, upon preparing the detected fault list at step 2402, the operation of the server proceeds to step 1604 where the prepared detected fault list and a test pattern sequence which is used in this preparation are transmitted to the client, subsequently proceeding to step 1405.

[0255] While the use of the client in the deletion and registration is not illustrated in the embodiment shown in FIGS. 48 and 49, upon preparing the detected fault list at step 2402 in FIG. 49, the server immediately transfers to step 2406 and transmits the detected fault list and the test pattern sequence which is used in the preparation to the client together with the notification indicating the completion of its operation. In response thereto, the client, upon receiving the notification of the completion of operation at step 2303 shown in FIG. 48, performs the deletion of faults in accordance with the detected fault list which is received as well as the registration of the received test pattern sequence before transferring to step 2304.

[0256] When modifying the embodiment shown in FIGS. 52 and 53 so that the client performs the deletion and registration, such modification may take place in a similar manner as a modification from FIGS. 50 and 51 to FIGS. 54 to 55.

[0257] In FIGS. 49, 51 and 53, the server deletes faults contained in the detected fault list from the list of fault maintained by the client while the client registers the test pattern sequence with a test pattern sequence list maintained by it, but the server may transmit the detected fault list and a test pattern sequence to the client, which may then perform the deletion and the registration.

[0258] The test pattern generation mentioned above may be performed by a computer, for example. By way of example, an apparatus which executes the method according to the first aspect of the present invention is shown in FIG. 56. As shown, CPU 11 executes a program stored in a memory 12 to control the overall operation. Initially, entry means 13 downloads circuit information of a circuit under test, for example, which is momentarily stored in a memory 14. A program for preparing a fault list which is stored in a memory 15 is then executed to derive a fault list, which is stored in a further memory 16. One of the faults is then selected from the fault list stored in the memory 16 in the manner mentioned above. A program which determines, by the implication operation, a test pattern sequence intended to activate a location corresponding to the selected fault and to cause a signal therefrom to be propagated to a next logic gate which follows the fault location, either by generating an initialization test pattern v1 and a propagation test pattern v2 or by applying signal values according to the five value logic system is stored in a memory 17, and is then read out therefrom to be executed, and a resulting test pattern sequence is registered with a test pattern sequence list which is stored in a memory 18. Thereafter, a subsequent selected fault is chosen from the fault list stored in the memory 16.

[0259] For the embodiment shown in FIGS. 36 and 37, I_(DDT) fault simulation with a test pattern sequence which is registered or to be registered with the list of test pattern sequence stored in the memory 18 is performed by executing a program stored in a memory 19, and a program for preparing a detected fault list which is stored in a memory 21 is executed to prepare a fault list which can be detected with this test pattern sequence. This list is momentarily stored in RAM within the CPU 11, and a function of deleting such a fault or faults from the fault list stored in the memory 16 is added.

[0260] As indicated in parentheses in FIG. 56, a test pattern generating apparatus may comprise a fault list preparing unit 15, a faulty location activating test pattern sequence generator 17, I_(DDT) fault simulation program memory 19, a detected fault list preparing unit 21, a control unit 55, a fault list memory 16 and a test pattern sequence list memory 18. The control unit 55 exercises a control over other units to perform a series of processing operations associated with generating test patterns.

[0261] For the embodiments shown in FIGS. 32 and 33 and in FIGS. 34 and 35, the function of the client system may comprise CPU 11, the program memory 12, the entry means 13, the memory 14, the fault list preparing program memory 15, and the test pattern sequence list memory 18, all of which are shown in FIG. 56, and also comprises a transmitter/receiver 22 for communication with a server system or systems, as indicated in FIG. 57A. However, it is to be noted that a program stored in the memory 12 is different from that shown in FIG. 56, but is designed to perform the processing operations shown in FIG. 32 or FIG. 34. As shown in FIG. 57B, a corresponding server system comprises CPU 23 which executes a program stored in a memory 24 to serve activating the overall function of the server system. The server system comprises a transmitter/receiver 26 which communicates with the client system to receive a fault sub-list, which is then stored in a fault sub-list memory 25 to be processed subsequently. It also comprises the memory 17, shown in FIG. 56, which stores a fault location activating test pattern sequence generating program.

[0262] For the embodiments shown in FIGS. 38 and 39 and FIGS. 40 and 41, I_(DDT) fault simulation program memory 19 and the memory 21 which stores a detected fault list preparing program shown in FIG. 56 is added to the client system, as indicated in broken lines in FIG. 57A. It is also to be noted that the program stored in the memory 12 is designed to permit an exchange of information with the server system and to enable the processing operation shown in FIG. 38 or 40. In a corresponding server system, the fault sub-list memory 25 shown in FIG. 57B is omitted, and the program stored in the memory 24 is designed to enable the processing operation shown in FIG. 39 or 41. For the embodiment shown in FIGS. 42 and 43, the memories 19 and 21 shown in FIG. 57A are omitted from the client system, and the program stored in the memory 12 is designed to permit an exchange of information with a server system and to enable the processing operation shown in FIG. 42. In the corresponding server system, the fault sub-list memory 25 shown in FIG. 57B is omitted, and the program stored in the memory 24 is designed to enable the processing operation shown in FIG. 43. For the embodiment shown in FIGS. 44 and 45, an intended function can be achieved by a computer with an implementation as shown in FIG. 57A and 57B respectively.

[0263] The client system may comprise the fault list preparing unit 15, I_(DDT) fault simulation program memory 19, the detected fault list preparing unit 21, the control unit 55, the fault list memory 16, the test pattern sequence list memory 18 and the transmitter/receiver 22, as indicated in parentheses in FIG. 57A, allowing the control unit 55 to exercise a control over other units. The server system may comprise the fault location activating test pattern sequence generator 17, the control unit 56, the transmitter/receiver 26 and the fault sub-list memory 25, as indicated in parentheses in FIG. 57B, allowing the control system 56 to exercise a control over other units.

[0264] A test pattern generating apparatus for the embodiment shown in FIG. 46 may be constructed as shown in FIG. 58 so that CPU 31 executes a program stored in a memory 32 to control the overall functioning so that circuit information of a circuit under test is downloaded through entry means 33 to be stored in a memory 34 momentarily and so that a program for preparing a fault list which is stored in a memory 35 is executed upon circuit information which is stored in the memory 34 to determine all path delay faults, thus preparing a fault list which is then stored in a memory 36. A test pattern generating program stored in a memory 37 is then executed to generate a test pattern sequence (it being understood that this may take place through hardware). A transition simulation for the test pattern sequence applied to the circuit under test takes place by executing a program stored in a memory 38, and then a program stored in a memory 39 is executed to prepare a detected fault list, which is then momentarily stored in RAM within CPU 31 or in the memory 34. Faults which are contained in the detected fault list (paths) are deleted from the fault list memory 36, and the test pattern sequence used is stored in a test pattern sequence list memory 41. A similar process is then repeated until the number of path delay faults which remains within the fault list memory 36 is reduced to or less than a given number (including 0).

[0265] The test pattern generating apparatus may comprise the fault list preparing unit 35, the test pattern generator 37, the transition simulation unit 38, the detected fault list preparing unit 39, the control unit 47, the fault list memory 36 and the test pattern sequence list memory 41, as indicated in parentheses in FIG. 58, allowing the control unit 47 to exercise a control over other units.

[0266] For the embodiments shown in FIGS. 48 and 49, in FIGS. 50 and 51, in FIGS. 52 and 53 and in FIGS. 54 and 55, the client system is implemented in a manner shown in FIG. 59A where the memory 38 storing the fault simulation program and the memory 39 storing the detected fault list preparing program, both shown in FIG. 58, are omitted while a transmitter/receiver 42 for enabling a communication with a server is added. It is to be understood that a program stored in the memory 32 is designed to enable each processing operation shown in FIG. 48, 50, 52 or 54, respectively. In the example shown in FIG. 50, there is provided a memory 49 for a list of test pattern sequence generated by the test pattern sequence generator 41 or a generated pattern list, as illustrated in FIG. 59A.

[0267] On the other hand, a corresponding server system is constructed in a manner shown in FIG. 59B so that a communication with a client system is enabled through a transmitter/receiver 43, and in order to enable a detected fault list to be prepared, the fault list which is prepared by the client system is previously transferred into a memory 44. The server system includes the memory 38 which stores the transition simulation program and the memory 39 which stores the program for preparing the detected fault list, both shown in FIG. 58. In the example shown in FIG. 49, CPU 45 executes a program stored in a memory 46 to perform the processing operation shown in FIG. 49 each time a test pattern sequence is transmitted from the client system. In the example shown in FIG. 51, a test pattern sequence is derived from the generated pattern list stored in the memory 49 of the client system to perform the processing operation shown in FIG. 51. In the example shown in FIG. 53, the server system includes a test pattern sequence sub-list memory 51 for storing a test pattern sequence sub-list which is received from the client system to perform the processing operation shown in FIG. 53. In the similar manner, in the example shown in FIG. 55, the processing operation shown in FIG. 55 is performed.

[0268] As indicated in parentheses in FIG. 59A, the client system comprises the fault list preparing unit 35, the test pattern sequence generator 41, the control unit 47, the fault list memory 36, the test pattern sequence list memory 41 and the transmitter/receiver 42, allowing the control unit 47 to exercise a control over other units. In the similar manner, the server system may comprise the transition simulation unit 38, the detected fault list preparing unit 39, the control unit 48, the transmitter/receiver 43 and the fault list memory 44, as shown in FIG. 59B, allowing the control unit 48 to exercise a control over other units.

[0269] With the test pattern generating method or apparatus according to the first aspect of the present invention, by utilizing a transient power supply current testing technique which affords a high level of observability and capable of efficiently testing a gate delay fault or an open fault, test patterns which test a gate delay fault or an open fault can be easily generated to provide a drastic improvement in the efficiency of generating test patterns.

[0270] With the test pattern generating method or apparatus according to the first aspect of the present invention, there is no need that the influence of a gate delay fault or an open fault to be propagated to an output signal line, and this allows a probability of causing a conflict with logic values on signal lines during the implication operation which is used in generating test patterns to be reduced, thus allowing the number of backtracks (or retries) in setting up input signals when generating the initialization test pattern and the propagation test pattern to be reduced and thus allowing a time interval required for generating test patterns to be drastically reduced.

[0271] In certain embodiments of the test pattern generating method and apparatus according to the first aspect of the present invention, a detected fault list can be prepared by the transient power supply current fault simulation (I_(DDT) fault simulation) which operates more rapidly than the test pattern processing, and the number of faults for which the test patterns must be generated can be reduced, thus allowing the time interval required for generating test patterns to be further reduced.

[0272] With the test pattern generating method and/or apparatus according to the second aspect of the present invention, the use of the transient power supply current testing technique which affords a high level of observability and allows a gate delay fault and an open fault to be efficiently tested allows test patterns which are required to test a path delay fault to be easily generated, thus allowing a drastic improvement in the efficiency of generating test patterns.

[0273] Also in certain embodiments of the test pattern generating method and/or apparatus according to the second aspect of the present invention, the detected fault list can be prepared by using the fault simulation which operates more rapidly than the operation of generating test patterns, and faults contained in this list can be deleted from the fault list, for which test patterns must be generated, thus allowing a reduction in the time interval required for generating test patterns. 

What is claimed is:
 1. A method of generating a test pattern sequence which is used to test a semiconductor integrated circuit, comprising a fault list preparing step which prepares a fault list in which faults occurring in a semiconductor integrated circuit under test are registered; a fault selection step of selecting one of the faults from the fault list; pattern sequence generating step for obtaining a test pattern sequence which applies a signal or signals, which activate the selected fault, to a location corresponding to the selected fault and which propagates the signal or signals to the output of a following logic gate which input is connected to the location of the fault; a registering step in which the test pattern sequence obtained is registered with a test pattern sequence list; and a step of repeating every step beginning with the fault selection step.
 2. A method according to claim 1, using a client system and a plurality of server systems; further comprising the steps of causing the client system to perform the fault list preparing step; causing the client system to activate the plurality of server systems; performing the fault selection step in response to a request from one of the server systems and transmitting the selected fault to said one server system; causing each of the server systems to perform the pattern sequence generating step with respect to the selected fault which is transmitted from the client system; causing the server systems to return a test pattern sequence which is obtained at the pattern sequence generating step and to request another selected fault to be processed; and causing the client system to perform the registering step to register the test pattern sequence returned from the server system.
 3. A method according to claim 1, using a client system and a plurality of server systems; further comprising the steps of causing the client system to perform the fault list preparing step; causing the client system to activate the plurality of server systems; causing each of the server systems to perform the fault selection step in which the server selects one of the faults from the fault list prepared by the client system and to perform the pattern sequence generating step; causing the server system to return the test pattern sequence which it has obtained at the pattern sequence generating step to the client system; and causing the client system to perform the registering step in which it registers the pattern sequence returned from the server system.
 4. A method according to claim 1, further comprising the steps of performing a transient power supply current fault simulation upon the semiconductor integrated circuit using the test pattern sequence which is registered to prepare a fault list which can be detected with that test pattern sequence to provide a detected fault list; and deleting the faults contained in the detected fault list from the fault list which is prepared at the fault list preparing step.
 5. A method according to claim 2, further comprising the steps of performing a transient power supply current fault simulation upon the semiconductor integrated circuit using the test pattern sequence which is registered to prepare a fault list which can be detected with that test pattern sequence to provide a detected fault list; and deleting the faults contained in the detected fault list from the fault list which is prepared at the fault list preparing step.
 6. A method according to claim 3, further comprising performing a transient power supply current fault simulation upon the semiconductor integrated circuit using the test pattern sequence which is registered to prepare a fault list which can be detected with that test pattern sequence to provide a detected fault list; and deleting the faults contained in the detected fault list from the fault list which is prepared at the fault list preparing step.
 7. A method according to claim 1, using a client system and a plurality of server systems; further comprising the steps of causing the client system to perform the fault list preparing step; causing the client system to divide the fault list into a plurality of fault sub-lists, which are then transmitted to the plurality of server systems; each of the server systems performing the fault selection step from the fault sub-list transmitted thereto from the client system and performing the pattern sequence generating step; each of the server systems returning the test pattern sequence which it has obtained at the pattern sequence generating step to the client system; and the client system performing the registering step in which it registers the test pattern sequence returned from the server system.
 8. A method of generating a test pattern sequence which is used to test a semiconductor integrated circuit, comprising a fault list preparing step in which a list of path delay faults for the semiconductor integrated circuit under test is prepared as a fault list; pattern sequence generating step in which a test pattern sequence including two or more test patterns to be applied to the semiconductor integrated circuit is generated; a transition signal values calculating step in which a simulation of transitions occurring in the semiconductor integrated circuit when the test pattern sequence is applied thereto is made to calculate a train of transition signal values occurring on signal lines within the circuit; a detected fault list preparing step in which a fault list which can be detected by the transient power supply current testing when the test pattern sequence is applied to the semiconductor integrated circuit by using the transition signal values on each of the signal lines to provide a detected fault list; a deletion step in which the faults contained in the detected fault list are deleted from the fault list; a registering step in which the test pattern sequence is registered with a test pattern sequence list; and a step of repeating the steps beginning with the pattern sequence generating step.
 9. A method according to claim 8, using a client system and a plurality of server systems; further comprising the steps of causing the client system to perform the fault list preparing step and to perform the pattern sequence generating step; transmitting test pattern sequence one to each of the server systems which are not engaged with a processing operation; each of the server systems performing a step of calculating a train of transition signal values with the test pattern sequence which has been transmitted thereto from the client system, performing the detected fault list preparing step, carrying out the deletion step with respect to the fault list maintained by the client system and performing the registering step for registering that test pattern sequence with the test pattern sequence list maintained by the client system; causing the server system to notify the client system the completion of its operation; the client system generating and transmitting the pattern sequence each time it receives the notification of the completion of operation.
 10. A method according to claim 8, using a client system and a plurality of server systems; further comprising the steps of causing the client system to perform the fault list preparing step and to perform the test pattern sequence generating step and to prepare a generating pattern list comprising the test pattern sequence thus generated; activating the plurality of server systems; each of the server systems selecting one of the test pattern sequence from the generated pattern list maintained by the client system and performing the transition signal values calculating step with the selected test pattern sequence and performing the detected fault list preparing step; the server system performing the deletion step with respect to the fault list maintained by the client system and performing the registering step with respect to the test pattern sequence list also maintained by the client system.
 11. A method according to claim 8, using a client system and a plurality of server systems; further comprising the steps of the client system performing the fault list preparing step and also performing the test pattern sequence generating step to prepare a list of test pattern sequence; the client system dividing the list of test pattern sequence into a plurality of test pattern sequence sub-lists, which are transmitted by the client system to the plurality of server systems; each of the server systems selecting one of the test pattern sequence from the list thereof which has been transmitted thereto from the client system, performing the transition signal values calculating step with the selected test pattern sequence, performing the detected fault list preparing step, performing the step of deleting from the fault list maintained by the client system, performing the registering step with respect to the test pattern sequence list also maintained by the client system, ceasing to generate test patterns whenever there remains no test pattern sequence in the test pattern sequence sub-list which is not yet selected, and notifying the client system the completion of its operation.
 12. A method according to claim 8, using a client system and a plurality of server systems; further comprising the steps of the client system performing the fault list preparing step and performing the test pattern sequence generating step; transmitting different test pattern sequence generated during the test pattern sequence generating step to the plurality of server systems; each of the server systems performing the transition signal values calculating step with the test pattern sequence which has been transmitted thereto from the client system, performing the detected fault list preparing step and transmitting the detected fault list thus prepared and the test pattern sequence which is used to prepare the list to the client system; the client system performing the deletion step using the received detected fault list and performing the registering step with respect to the received test pattern sequence.
 13. An apparatus for generating test pattern sequence which is used to test a semiconductor integrated circuit, comprising a fault list memory for storing a fault list in which faults for a semiconductor integrated circuit under test are registered; a test pattern sequence generator for generating a test pattern sequence for applying a signal or signals which activate the fault, which is a selected one of the faults in the fault list, to a location corresponding to the fault and for propagating the signal or signals to the output of a following logic gate which input is connected to the location of the fault; a test pattern sequence list memory for storing the test pattern sequence generated; and a control unit for selecting one of the faults from the fault list, controlling the test pattern sequence generator and for storing the test pattern sequence.
 14. An apparatus according to claim 13, further comprising a client system and a plurality of server systems; the client system comprising a transmitter/receiver for communication with each of the server systems, the fault list memory, the test pattern sequence list memory, and a first controller for selecting one of the faults from the fault list in response to a request from one of the server systems and transmitting the selected fault to said one server system and for storing test pattern sequence which it has received from said one server system in the test pattern sequence list memory; each of the server systems comprising a transmitter/receiver for communication with the client system, the test pattern sequence generating unit, and a second controller for activating the test pattern sequence generating unit for the selected fault which it has received from the client system and for transmitting the test pattern sequence generated to the client system; said control unit comprising the first and the second controller.
 15. An apparatus according to claim 13, further comprising a client system and a plurality of server systems; the client system comprising a transmitter/receiver for communication with each of the server systems, the fault list memory, the test pattern sequence list memory and a first controller for storing the test pattern sequence which it has received from the server system in the test pattern sequence list memory; each of the server systems comprising a transmitter/receiver for communication with the client system, the test pattern sequence generating unit, and a second controller for selecting one of the faults from the fault list memory of the client system, for activating the test pattern sequence generating unit and for transmitting the test pattern sequence generated to the client system; the control unit comprising the first and the second controller.
 16. An apparatus according to claim 13, further comprising a detected fault list preparing unit which performs a transient power supply current fault simulation upon the semiconductor integrated circuit using the test pattern sequence stored in the test pattern sequence list memory and preparing a fault list which can be detected with that test pattern sequence to provide a detected fault list; the control unit being operative to delete the faults contained in the detected fault list from the fault list memory.
 17. An apparatus according to claim 14, further comprising a detected fault list preparing unit which performs a transient power supply current fault simulation upon the semiconductor integrated circuit using the test pattern sequence stored in the test pattern sequence list memory and which prepares a fault list which can be detected with that test pattern sequence to provide a detected fault list; the control unit being operative to delete faults contained in the detected fault list from the fault list memory.
 18. An apparatus according to claim 15, further comprising a detected fault list preparing unit which performs a transient power supply current fault simulation upon the semiconductor integrated circuit using the test pattern sequence stored in the test pattern sequence list memory and which prepares a fault list which can be detected with that test pattern sequence to provide a detected fault list; the control system being operative to delete faults contained in the detected fault list from the fault list memory.
 19. An apparatus according to claim 13, further comprising a client system and a plurality of server systems; the client system comprising a transmitter/receiver for communication with the plurality of server systems, the fault list memory, and a first controller for dividing the fault list into a plurality of fault sub-lists to be transmitted to the plurality of servers and for storing the test pattern sequence received from the server system in the test pattern sequence list memory; each of the server systems comprising a transmitter/receiver for communication with the client system, a fault sub-list memory for storing the fault sub-list, the test pattern sequence generating unit, and a second controller for storing the received fault sub-list in the fault sub-list memory, selecting one of the faults from the fault sub-list memory to activate the test pattern generating unit, and for transmitting the test pattern sequence generated to the client system; the control unit comprising the first and the second controller.
 20. An apparatus for generating test pattern sequence which is used to test a semiconductor integrated circuit, comprising a fault list memory for storing a list of path delay faults for a semiconductor integrated circuit under test; a test pattern sequence list memory in which test pattern sequence are stored; a pattern sequence generator for generating a test pattern sequence including two or more test patterns and which is to be applied to the semiconductor integrated circuit; a transition signal values calculating unit for performing a simulation of transitions which would occur in the semiconductor integrated circuit when the test pattern sequence generated is applied thereto to calculate a train of transition signal values which occur on signal lines within the circuit; a detected fault list preparing unit for preparing a fault list which can be detected by a transient power supply current testing when the generated test pattern sequence is applied to the semiconductor integrated circuit using the transition signal values on said signal lines, thus providing a detected fault list; and a control unit for deleting faults contained in the detected fault list from the fault list memory, for storing a test pattern sequence generated in the test pattern sequence list memory, and activating the pattern sequence generating unit, the transition signal values calculating unit and the detected fault list preparing unit until the number of path delay faults which remain in the fault list memory is reduced to a given value or less.
 21. An apparatus according to claim 20, further comprising a client system and a plurality of server systems; the client system comprising a transmitter/receiver for communication with the plurality of server systems, the fault list memory, the test pattern sequence list memory, the pattern sequence generator, and a first controller for causing the server system to transmit the test pattern sequence generated upon receiving a notification from the server system indicating the completion of its operation; each of the server systems comprising a transmitter/receiver for communication with the client system, the transition signal values calculating unit, the detected fault list preparing unit, and a second controller for activating the transition signal values calculating unit and the detected fault list preparing unit in response to the test pattern sequence which is received from the client system for deleting the faults contained in the detected fault list from the fault list memory of the client system, for causing the test pattern sequence generated to be stored in the test pattern sequence list memory of the client system and for notifying the client system the completion of operation of the server system; the control unit comprising the first and second controller.
 22. An apparatus according to claim 20, further comprising; a client system and a plurality of server systems; the client system comprising a transmitter/receiver for communication with the plurality of server systems, the fault list memory, the test pattern sequence generating unit and a generating pattern memory which stores a list of test pattern sequence generated; each of the server systems comprising a transmitter/receiver for communication with the client system, the transition signal values calculating unit, the detected fault list preparing unit, and the control unit which allows each server system to acquire one of test pattern sequence from the generated pattern memory of the client system, activates the transition signal values calculating unit and the detected fault list preparing unit to operate with the test pattern sequence acquired to delete the faults contained in the detected fault list from the fault list memory of the client system and to store the test pattern sequence in the test pattern sequence list memory of the client system.
 23. An apparatus according to claim 20, further comprising; a client system and a plurality of server systems; the client system comprising a transmitter/receiver for communication with the plurality of server systems, the fault list memory, the test pattern sequence list memory, the test pattern sequence generator, and a first controller for dividing the list of test pattern sequence generated into a plurality of test pattern sequence sub-lists to be transmitted to the plurality of server systems; each of the server systems comprising a transmitter/receiver for communication with the client system, the transition signal values calculating unit, the detected fault list preparing unit, a test pattern sequence sub-list memory for storing a received test pattern sub-list, and a second controller which allows each server system to derive one of the test pattern sequence from the test pattern sequence sub-list memory to activate the transition signal values calculating unit and the detected fault list preparing unit, for deleting the faults contained in the detected fault list from the fault list memory of the client system and for storing the test pattern sequence in the test pattern sequence list memory of the client system; the control unit comprising the first and the second controller.
 24. An apparatus according to claim 20, further comprising a client system and a plurality of server systems the client system comprising a transmitter/receiver for communication with the plurality of server systems, the fault list memory, the test pattern sequence generator, and a first controller for deleting faults contained in the detected fault list from the fault list memory and for storing the test pattern sequence received from each server system in the test pattern sequence list memory; each of the server systems comprising a transmitter/receiver for communication with the client system, the transition signal values calculating unit, the detected fault list preparing unit, and a second controller for activating the transition signal values calculating unit and the detected fault list preparing unit for the received test pattern sequence and for transmitting the test pattern sequence and the detected fault list to the client system; the control unit comprising the first and the second controller. 